A regeneration process pretreatment method for dry etching lower electrodes
A pretreatment, electrode technology, applied in the direction of metal material coating process, coating, melting spray plating, etc., can solve the problems of bumping, small smooth roughness, large size, etc., to achieve the effect of convenient operation and improved effect
Active Publication Date: 2020-11-20
芜湖通潮精密机械股份有限公司
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Problems solved by technology
[0005] When the lower electrode is completely regenerated, it is necessary to carry out plasma spraying on the metal substrate and the upper end of the ceramic tube to make the surface adhere to Al2O3 powder. The surface of the substrate is slightly lower, and the effect of direct spraying is very poor, which affects the subsequent process
[0006] Because the size of the lower electrode is very large, it must be hoisted and transported by crane during spraying, machining and grinding. During the transportation, there may be bumps and damage to the coating, and it is very difficult to repair by spraying. It may be necessary to peel off all the coatings again. and then spray
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[0028] A regeneration process pretreatment method for dry etching the lower electrode is as follows:
[0029] First put the lower electrode into the oven to dry for 2-3 hours, and set the oven to 55-60°C to preheat the product;
[0030] Then hang the product out and use a CDA air gun to blow out the dust in the helium hole and the lift pin hole, and then use a cotton swab dipped in isopropanol to clean the inner wall of the ceramic tube and the surrounding of the ceramic tube (the upper end surface of the ceramic tube and the upper electrode and the ceramic tube) handover parts) wipe clean;
[0031] Then prepare an epoxy resin vacuum glue. During the preparation process, use a bamboo toothpick to stir the glue quickly until it becomes latex; then apply the stirred epoxy vacuum glue evenly on the helium hole, lift pin hole and DCport. Note that the substrate must be high when applying glue, and the ceramic tube is installed on the lower electrode by sinking, so the upper end s...
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The invention discloses a regeneration technology pretreatment method of a dry-etching lower electrode. The regeneration technology pretreatment method is characterized by comprising the following steps: step 1, drying the lower electrode in a baking oven; step 2, cleaning a ceramic pipe on the lower electrode; step 3, uniformly smearing epoxy resin vacuum glue on the inner wall and upper end surface of the ceramic pipe on the lower electrode; step 4, drying the lower electrode in the baking oven; step 5, grinding the solidified epoxy resin vacuum glue; step 6, performing the sand blasting treatment for the ground epoxy resin vacuum glue; and step 7, performing the plasma spraying for the lower electrode. The regeneration technology pretreatment method has the advantages that the operationis convenient and simple, the plasma spraying effect can be greatly improved, and the smoothness of the production process can be ensured.
Description
technical field [0001] The invention relates to the regeneration process of the lower electrode. Background technique [0002] In the production process of the liquid crystal panel, a procedure of dry etching (dry etching) is required. Simply put, dry etching is a way to place a specific gas under a low pressure state and apply a voltage to excite it into plasma, chemically etch and ion bombard a specific film layer to remove the film layer. [0003] An important component required in the dry etching process is the lower electrode. The lower electrode is a huge metal plate made of aluminum alloy or stainless steel. There are helium holes, lift pin holes and DCport holes on the surface. These holes are composed of ceramic tubes. [0004] The current problems are as follows: [0005] When the lower electrode is completely regenerated, it is necessary to carry out plasma spraying on the metal substrate and the upper end of the ceramic tube to make the surface adhere to Al2O3...
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IPC IPC(8): C23C4/02C23C4/134
CPCC23C4/02C23C4/134
Inventor 强军
Owner 芜湖通潮精密机械股份有限公司