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A four-degree-of-freedom magnetic field testing device

A degree of freedom and magnetic field measurement technology, applied in the direction of measuring device, magnetic property measurement, magnetic variable measurement, etc., can solve the problems of complex magnetic field distribution, complex mechanical structure, etc., and achieve simple structure, large measurement range, convenient disassembly and maintenance Effect

Active Publication Date: 2021-06-11
BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Different magnets have different structures and different magnetic fields, which have the characteristics of complex mechanical structure and complex magnetic field distribution.

Method used

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  • A four-degree-of-freedom magnetic field testing device
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  • A four-degree-of-freedom magnetic field testing device

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Embodiment Construction

[0018] By the following figure 1 Attachment figure 2 Attachment image 3 Attachment Figure 4 The present invention has been described, but is not limited to the present invention.

[0019] See figure 1 , figure 2 , image 3 , Figure 4 A four-free magnetic field testing device, including: gantry motion platform module (1), probe link module (2), rotating platform module (3). This magnetic field measuring device uses the gantry structure to control the coordinates of the probe in the three-dimensional space. The probe at the front end of the rod can be rotated 360 ° to test the magnetic field of different components. The gantry structure is directly controlled on a rotatable platform, and the rotating platform allows the magnetic measuring device to rotate overall, convenient for testing.

[0020] In this embodiment, the gantry moving platform module (1) is connected by three linear motion platforms, and can be moved along the three directions along the three directions by the motor, ...

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Abstract

The invention discloses a four-degree-of-freedom magnetic field measuring device, comprising: a gantry motion platform module (1), a probe connecting rod module (2), and a rotating platform module (3). Among them, the gantry motion module (1) is connected by three linear motion platforms, which can realize the movement along the X, Y, and Z directions through the motor, so as to accurately control the moving position and coordinates of the probe; the probe connecting rod module (2) It consists of connecting rod base, connecting rod and Gaussian probe. The Gauss probe is located at the front end of the connecting rod and can be rotated 360° so as to measure different components of the magnetic field; the rotating platform module (3) is composed of a horizontal platform and a rotating platform. The rotating platform is used to fix the gantry motion platform, which can realize a certain angle Rotate to adjust the magnetic measurement angle. The invention relates to a magnet measuring device, which belongs to the field of semiconductor manufacturing.

Description

Technical field [0001] The present invention relates to a semiconductor device fabrication equipment, a ion implant, and particularly to a device for the measurement of the respective magnet magnetic fields of the ionic injection machine. Background technique [0002] As the integrated circuit process continues to advance, the ion implantation equipment is also constantly updating. Ion implantation equipment can be used in various materials modification, semiconductor components manufacturing, electronic devices manufacturing and other fields. The ion implantation machine is mainly composed of a variety of different structural magnets. These include analyzing magnets, parallel lenses, quadrupole lenses, and the like. [0003] The magnet belongs to the core components of the ion implantation device, directly determines the performance of the ion implantation device. Different magnet structures are different, the magnetic fields are different, and there are complicated mechanical s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/10G01R33/12G05D3/12
CPCG01R33/10G01R33/12G05D3/12
Inventor 贾晓亮王凯波
Owner BEIJING ZHONGKEXIN ELECTRONICS EQUIP