Measuring device and method for secondary electron characteristic parameters of material in low and high-temperature environments

Abstract

The invention discloses a measuring device and method for secondary electron characteristic parameters of a material in low and high-temperature environments. A secondary electron detector in the measuring device is arranged in a vacuum chamber and comprises a spherical shell collection shell, a spherical shell grid electrode and a spherical shell grounding electrode which are arranged from outside to inside in sequence and are all greater than or equal to 3 / 4 of a sphere and insulated from one another; a sample table and a temperature adjustment system and an angle distribution measuring system thereof are also arranged in the secondary electron detector; an electron beam emitted by an electron gun run through the secondary electron detector and is injected into the sample table. The device can measure secondary electron emission coefficients, secondary electron angle distribution characteristics and secondary electron energy spectrum distributions of a metal material and a medium material under the low and high-temperature environments and can further measure the secondary electron characteristic parameters under different incident angles; charges accumulated on the surface of amedium can be effectively neutralized by quickly heating the medium material, and the measuring time is reduced; furthermore, by introducing a checking mechanism, the accuracy and the reliability of ameasuring result are guaranteed.

Description

technical field [0001] The invention belongs to the technical field of measuring devices and methods for material characteristic parameters, and in particular relates to a measuring device and method for measuring secondary electron characteristic parameters of materials in high and low temperature environments. Background technique [0002] The secondary electron multiplication effect of materials has attracted more and more attention from relevant researchers in the current research fields of materials and physics. Especially in the field of accelerator research, the electron cloud effect caused by the secondary electron multiplication of materials has limited the beam quality of circular accelerators. , and even cause unstable operation of the machine. With the proposal and construction of large-scale synchrotron radiation sources in China (such as the pre-research and construction of Beijing High-Energy Light Source, the pre-research of Hefei Advanced Light Source, the c...

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Problems solved by technology

At present, the test devices and test methods related to secondary electrons at home and abroad mainly have the following characteristics: (1) the measurement is concentrated in the normal temperature environment; (2) all measurements are limited to the measurement of the secondary electron emission coefficient, and the secondary electron characteristics Insufficient research on secondary electron spectrum measurement in parameters; (3) Insufficient research on secondary electron angular distribution, complete measurement cannot be performed, and calibration cannot be performed after simple measurement; (4) Secondary electron emission coefficient and incident The relationship between the beam current, the relationship between the secondary electron emission coefficient and the irradiation dose is insufficient.

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