Device and method for unbinding flat target material and rotary target material

A technology of rotating target and flat target, which is applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of unsuitable target material, achieve the goal of intact target material, convenient collection of residual indium, and uniform heating temperature Effect

Pending Publication Date: 2019-01-08
GUANGXI CRYSTAL UNION PHOTOELECTRIC MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The patent application is to chemically unbind the target material bound with electrolyte, that is, to dis...

Method used

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  • Device and method for unbinding flat target material and rotary target material
  • Device and method for unbinding flat target material and rotary target material
  • Device and method for unbinding flat target material and rotary target material

Examples

Experimental program
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Embodiment 1

[0029] Example 1: A device for planar and rotating target unbinding, such as Figure 1-Figure 8 As shown, it includes an oil bath 1, a heating assembly 3, a planar target grid bracket 6, a rotating target bracket 5 and an indium collection basket 7. The bottom surface of the oil bath is inclined, and there is a collection The indium basket is placed in the groove 2, the indium collection basket 7 is placed in the indium basket placement groove 2, and the heating assembly 3 is composed of a connecting rod 31 and a plurality of heating rods 32 evenly installed on the connecting rod. The heating rod is a U-shaped heating tube, and the heating assembly 3 is installed in the oil bath 1. The planar target grid bracket 6 includes a plurality of partitions 61 with small holes thereon, and the plurality of partitions are separated by a certain distance. Arranged obliquely, the upper and lower ends on both sides of the plurality of partitions are connected by an upper link 62 and a lowe...

Embodiment 2

[0033] Embodiment 2: A method for unbinding a plane and a rotating target, using the device for unbinding a plane and a rotating target described in Embodiment 1, comprising the following steps:

[0034] (1) Select the planar target grid bracket or rotating target bracket to be used according to the target type that needs to be unbound;

[0035] (2) There are two operation methods; method 1: put the planar target grid bracket or rotating target bracket into the oil bath first, and then add oil bath oil to the oil bath; method 2: first add oil to the oil bath Add oil bath oil into the bath, and then put the planar target grid bracket or rotating target bracket into the oil bath;

[0036] (3) Heat the oil bath oil to 170°C-250°C;

[0037] ⑷ Place the planar or rotating target bound with indium metal to be unbound and the back plate pasted together with the target on the corresponding bracket. After the indium melts, the separated target and back plate can be placed Take out se...

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PUM

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Abstract

The invention relates to a device and method for unbinding a flat target material and a rotary target material. The device comprises an oil bath, a heating element, a flat target material grid bracket, a rotary target material bracket and an indium collection basket, wherein the bottom surface of the oil bath is arranged obliquely; an indium collection basket placing groove is formed at the lowestposition of the bottom surface of the oil bath; the indium collection basket is placed in the indium collection basket placing groove; the heating element consists of a connecting rod and a pluralityof heating rods uniformly mounted on the connecting rod; the heating element is mounted in the oil bath; the flat target material grid bracket comprises a plurality of partition boards, small holes are formed in each of the partition boards, the partition boards are arrayed obliquely at a certain distance, and the two sides of each of every two adjacent partition boards are connected with each other by an upper rod and a lower rod; the rotary target material bracket is formed by two guide rails and a rotary target material support glidingly mounted on the guide rails. The device and the method are suitable for unbinding a target material bound by an indium metal and can be used for unbinding the flat target material and the rotary target material in batch, the unbinding temperature is uniform, the target materials are in good condition after unbinding, and the unbinding efficiency is high.

Description

technical field [0001] The invention relates to a device and method for unbinding plane and rotating targets. Background technique [0002] When the magnetron sputtering target is used, the target and the back plate need to be welded together. Indium is usually used as the solder for brazing. The utilization rate of the target by magnetron sputtering is below 80%, and the remaining waste target needs to be removed from the back plate to facilitate the recycling of the target and the reuse of the back target. This process is called target unbinding. The currently used unbinding method is to place the used target (including the back plate) on a hot stage, heat it, and remove the target from the back plate after the indium solder melts. Due to the uneven heating of the target, the removed waste target is usually fragmented, and is limited by the area of ​​the hot stage. At the same time, the number of unbound targets is small, because only one layer of target can be placed on...

Claims

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Application Information

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IPC IPC(8): C23C14/35
CPCC23C14/3407C23C14/35
Inventor 陆映东张倍维梁盈祥莫斌覃当凤
Owner GUANGXI CRYSTAL UNION PHOTOELECTRIC MATERIALS CO LTD
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