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Micro-hemispherical resonator gyroscope

A hemispherical resonant gyroscope and miniature technology, applied in the field of micro-electromechanical systems, can solve the problems of low electrical drive margin of gyroscope, large fundamental frequency difference, poor reliability, etc., so as to improve the electrical drive margin, high precision and high reliability. Effect

Inactive Publication Date: 2019-01-11
NORTH ELECTRON RES INST ANHUI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of the existing micro-hemispherical gyroscopes have disadvantages such as low precision, poor reliability, large fundamental frequency difference, and low electrical drive margin of the gyroscope.

Method used

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  • Micro-hemispherical resonator gyroscope
  • Micro-hemispherical resonator gyroscope
  • Micro-hemispherical resonator gyroscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Such as figure 2 with 5 Shown, a kind of miniature hemispherical resonant gyroscope, it comprises a groove-shaped base 1, is provided with support base 1b at the center of groove bottom, described support base 1b is cylindrical, is provided with support base 1b upper end The anchor point 2a is provided below the support anchor point 2a with a slot 2c that forms a plug-in fit with the support base 1b.

[0021] A harmonic oscillator 2 is provided at the top of the support anchor point 2a, and the harmonic oscillator 2 is in the shape of a hemispherical shell with an upward opening. The upper opening end of the resonator 2 is circular, and a circle of horizontally distributed flanging 2b is arranged at the end of the upper opening end. The upper surface of the flanging 2b is on the same level as the upper opening end face of the resonator 2. The resonator 2 and the flange 2b are of an integrated structure and are made of single crystal diamond.

[0022] A cover plate 3...

Embodiment 2

[0027] Such as figure 1 with 4 As shown, a miniature hemispherical resonant gyroscope includes a groove-shaped base 1, and a support seat 1b is provided at the center of the groove bottom. The support seat 1b is cylindrical, and is plugged into the support seat 1b. There are supporting anchor points 2a coaxially distributed. A harmonic oscillator 2 is provided at the top of the support anchor point 2a, and the harmonic oscillator 2 is in the shape of a hemispherical shell with an upward opening. The upper opening end of the resonator 2 is circular, and there is a circle of horizontally distributed flanges 2b outward on the upper opening end, the upper surface of the flange 2b is on the same level as the upper opening end surface of the resonator 2, The resonator 2 and the flange 2b are integrally formed and made of single crystal diamond.

[0028] A cover plate 3 is straddled at the top of the groove wall on both sides of the base 1, an insulating layer 3a is arranged on th...

Embodiment 3

[0033] Such as figure 2 with 3 Shown, a kind of miniature hemispherical resonant gyroscope, it comprises a groove-shaped base 1, is provided with support base 1b at the center of groove bottom, described support base 1b is cylindrical, is provided with support base 1b upper end The anchor point 2a is provided below the support anchor point 2a with a slot 2c that forms a plug-in fit with the support base 1b.

[0034] A harmonic oscillator 2 is provided at the top of the support anchor point 2a, and the harmonic oscillator 2 is in the shape of a hemispherical shell with an upward opening. The upper opening end of the resonator 2 is circular, and there is a circle of horizontally distributed flanges 2b outward on the upper opening end, the upper surface of the flange 2b is on the same level as the upper opening end surface of the resonator 2, The resonator 2 and the flange 2b are integrally formed and made of single crystal diamond.

[0035] A cover plate 3 is straddled at th...

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Abstract

The invention provides a micro-hemispherical resonator gyroscope. The micro-hemispherical resonator gyroscope comprises a base (1), the base (1) is internally provided with a harmonic oscillator (2),and a cover plate (3) is arranged on the base (1). The cover plate (3) is provided with a first electrode (4) and a second electrode (5), wherein the first electrode and the second electrode are matched with the harmonic oscillator (2) in a corresponding mode, and the cover plate (3) is further provided with signal output holes (6) separately matched with the first electrode (4) and the second electrode (5) in a corresponding mode. The micro-hemispherical resonator gyroscope has the advantages of simple structure, convenient manufacture, high precision, high impact resistance and the like.

Description

Technical field: [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a miniature hemispherical resonant gyroscope. Background technique: [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier. It has very important applications in the fields of attitude control, navigation and positioning. With the development of industries such as consumer electronics, industrial robots, vehicles, ship navigation, and drone manufacturing, the demand for gyroscopes is gradually developing in the direction of low cost, small size, high precision, and high reliability. Micro-electromechanical gyroscopes based on micro-electromechanical system technology adopt micro-nano processing technology, which has the characteristics of low mass production cost and good consistency. Among them, micro-hemispherical gyroscopes have the ability to be made into high-precision gyroscopes because of thei...

Claims

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Application Information

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IPC IPC(8): G01C19/56
CPCG01C19/56
Inventor 庄须叶王新龙
Owner NORTH ELECTRON RES INST ANHUI CO LTD
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