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Gyroscope structure based on piezoelectric/capacitive driving detection

A technology of piezoelectric drive and piezoelectric electrodes, applied in the direction of speed measurement by gyro effect, gyroscope/steering sensing equipment, speed/acceleration/impact measurement, etc., can solve the problems of single, limited detection and driving methods, and achieve basic Small frequency difference, improved electrical drive margin and sensitivity, and high reliability

Pending Publication Date: 2021-12-31
SHANDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method improves the stability of the micro-mechanical gyro system to a certain extent, but its detection and driving methods are limited and relatively simple.

Method used

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  • Gyroscope structure based on piezoelectric/capacitive driving detection
  • Gyroscope structure based on piezoelectric/capacitive driving detection
  • Gyroscope structure based on piezoelectric/capacitive driving detection

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Such as figure 1 , 2 , shown in 6, a kind of gyroscope structure based on piezoelectric / capacitive drive detection, it comprises axisymmetric resonator 1, described resonator and horn 1a are connected as a whole, the bottom of resonator 1 has an even number Piezoelectric detection electrode 4.

[0023] The bottom of the insulating layer base 2 is a ring-shaped groove, and a group of electrostatic electrodes 5 corresponding to the harmonic oscillator 1 are evenly distributed on the insulating layer base, and the inner and outer sets of electrostatic electrodes 5-1, 5-2 are composed of the harmonic oscillator 1 The differential capacitance can form a differential detection, and the base 2 and the resonator 1 are fixed by the anchor point 9 .

[0024] The upper end of the electrostatic electrode 5 on the insulating layer base 2 has a lead hole 6, which is consistent with the signal output hole 6a on the upper sleeve 3a, and the upper sleeve with the signal output hole 6a...

Embodiment 2

[0028] Such as image 3 As shown, a gyro structure based on piezoelectric / capacitive drive detection, the gyro structure introduces two kinds of axisymmetric resonators, namely resonator 1 and "w" type resonator 10, the insulating layer base of the device The seat 2 is provided with an annular groove on the annular end surface, the annular groove 4a is coaxial with the annular end surface of the upper opening end of the "w" type resonator 10, and the groove bottom of the annular groove is in line with the "w" The ring-shaped end face of the upper opening end of the "type resonator 10 is parallel, and there is a plane 11 on the "w" type resonator 10, on which a piezoelectric electrode 4 is arranged, and the piezoelectric electrode 4 is pasted with the plane 11 of the "w" resonator 10 .

[0029] In the middle of the "w"-shaped resonator 10, there is a cylindrical anchor rod 7 protruding vertically upward. As for the electrostatic electrode 5, the upper part of the differential...

Embodiment 3

[0033] Such as Figure 4 , 5 As shown, a gyro structure based on piezoelectric / capacitive drive detection, the gyro structure introduces two kinds of axisymmetric resonators, namely the resonator 1 and the "w" type resonator 10, and the opening end is circular to form a resonant An even number of piezoelectric electrodes 4 are evenly distributed on the lower end surface of the resonator of the axisymmetric structure 1 or "w" structure 10, and the piezoelectric electrodes and the lower end surface of the resonator are in the ring 1b. on the same level.

[0034] A group of signal output holes 6b corresponding to the piezoelectric electrodes are provided on the lower sleeve 3b.

[0035] working principle.

[0036] The present invention proposes a gyro structure based on piezoelectric / capacitive drive detection. The gyro can be driven by piezoelectric and electrostatic driving methods, and can be collected by using electrostatic and piezoelectric detection methods, which increa...

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Abstract

The invention provides a gyroscope structure based on piezoelectric / capacitance driving detection. The gyroscope structure comprises an insulating layer base (2), wherein a harmonic oscillator (1) is arranged in the insulating layer base (2), an upper sleeve (3a) is arranged on the insulating layer base (2), an electrostatic electrode (5) is arranged on the upper sleeve (3a) and correspondingly matched with the insulating layer base (2), a piezoelectric electrode (4) is arranged on the harmonic oscillator (1), and the upper sleeve (3a) and the lower sleeve (3b) are respectively provided with signal output holes (6) which are correspondingly matched with the piezoelectric electrode (4) and the electrostatic electrode (5). According to the gyroscope structure with the piezoelectric electrode and the electrostatic electrode, the gyroscope can be driven in the piezoelectric driving mode and the electrostatic driving mode, signal collection can be conducted in the electrostatic detection mode and the piezoelectric detection mode, the gyroscope driving and detection means are increased, the advantages of a piezoelectric driving detection method and an electrostatic driving detection method can be complemented, and the reliability and the detection performance of the gyroscope can be improved.

Description

technical field [0001] The invention relates to the field of axisymmetric resonant gyroscopes, in particular to an axisymmetric gyroscope structure based on piezoelectric / capacitive drive detection. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier. It has very important applications in the fields of attitude control, navigation and positioning. With the development of industries such as consumer electronics, industrial robots, vehicles, ship navigation, and drone manufacturing, the demand for gyroscopes is gradually developing in the direction of low cost, small size, high precision, and high reliability. Gyroscopes have the potential to be high-precision gyroscopes because of their strong shock resistance, and have become a research hotspot in the field of gyroscopes. However, most of the existing axisymmetric gyroscopes have disadvantages such as low precision, poor reliability, small effec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5656G01C19/5649G01C19/5663
CPCG01C19/5656G01C19/5649G01C19/5663
Inventor 庄须叶张晓阳李平华张佳宁刘靖豪
Owner SHANDONG UNIV OF TECH
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