MEMS Gyroscope with Overload Protection Mechanism

Abstract

The invention discloses a micro-electromechanical gyroscope with an overload protection mechanism, comprising: a gyroscope body provided with a limit slot; a control block provided with a limit latch adapted to the limit slot; the gyroscope body In the working state, the limit bolt does not overlap with the limit groove; when the gyroscope body is in a non-working state, the limit bolt and the limit groove overlap; the limit bolt and the limit groove overlap each other; When the grooves overlap, there is a gap between the limit latch and the side wall of the limit groove. In the present invention, when the gyroscope is not working, the limit latch on the control block and the limit groove on the driving mass have a certain overlapping length, and when the gyroscope is overloaded on the first axis, the range of motion of the driving mass will be limited. The limit of the bit latch, the limit value can be configured to be significantly smaller than the value of the drive displacement, so as to achieve the purpose of improving the anti-overload capability.

Description

technical field [0001] The invention relates to the technical field of microelectromechanical gyroscopes, in particular to a microelectromechanical gyroscope with an overload protection mechanism. Background technique [0002] MEMS gyroscopes are usually vibrating gyroscopes whose working principle is based on the Coriolis effect. When there is an input angular velocity, the detection mass will generate a certain displacement according to the movement speed of the driving mass, and the signal will be read out through a certain conversion method. Therefore, the performance of the gyroscope can be improved by increasing the displacement of the driving mass (that is, increasing the driving speed). [0003] The gyroscope may be overloaded in the form of falling or other forms when it is not working, especially in application scenarios such as smart ammunition that must have a large impact before starting to work. [0004] Without changing the signal processing circuit and proc...

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Problems solved by technology

[0005] When there is no displacement limiting structure in the driving direction, the above two methods will eventually cause the stress of the driving spring to increase when overloaded, resulting in fracture; Movement space, resulting in a more serious secondary impact problem between structures, which will also reduce the overload resistance of the device

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