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High-precision, high-field strength and capacitive sensor device for measuring miniature electric field based on piezoelectric effect

A piezoelectric effect and electric field measurement technology, applied in measurement devices, measurement of electrical variables, electromagnetic field characteristics, etc., can solve the problems of small output response signal, low measurement resolution, limited measurement range, etc., to achieve small size, breakdown strength High and easy mass production effect

Inactive Publication Date: 2019-01-15
TSINGHUA UNIV
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  • Abstract
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AI Technical Summary

Problems solved by technology

The disadvantage is that the measurement range is limited, it can only be applied to the normal electric field measurement under the low voltage level of the power grid, and the output response signal is small, and the measurement resolution is low

Method used

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  • High-precision, high-field strength and capacitive sensor device for measuring miniature electric field based on piezoelectric effect
  • High-precision, high-field strength and capacitive sensor device for measuring miniature electric field based on piezoelectric effect
  • High-precision, high-field strength and capacitive sensor device for measuring miniature electric field based on piezoelectric effect

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Embodiment 1

[0038] Such as figure 1 As shown, assuming that the cavity is cylindrical, the upper electrode layer just touches the lower electrode when the initial state is set and there is no pressure between the two layers. Let the radius of the upper and lower plates of the capacitor be a, and the parallel distance between the plates be t. exist In the cylindrical coordinate system, the coordinate origin O is located at the center of the upper surface of the insulating layer. Assume that the electric field E to be measured is along the z-axis direction, and the electric field causes in-plane tensile deformation of the upper electrode layer of the capacitor. Due to the fixed surroundings, the overall bending deformation of the film, on the basis of the initial state, the film presses the lower electrode layer. Increase, the contact area of ​​the upper and lower electrode layers increases, and the capacitance further increases.

[0039] The deformation of the piezoelectric film under t...

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Abstract

The invention discloses a high-precision, high-field strength and capacitive sensor device for measuring a miniature electric field based on a piezoelectric effect. The sensor device comprises a piezoelectric membrane layer. An upper electrode layer is attached below the piezoelectric membrane layer. The upper electrode layer is supported by a supporting layer. A fixed reference layer is arrangedbelow the upper electrode layer. The fixed reference layer is electrically connected with an impedance detection apparatus. The upper electrode layer is electrically connected with the impedance detection apparatus through an electrode guiding column. The beneficial effect is that: the device has a large electric field measurement range, a high response and sensitivity, and an adjustable linearity; the device can also meet the requirements for monitoring power grid steady state operation and identifying overvoltage fault transient signals except for real-time monitoring large electrical equipment in industrial production.

Description

technical field [0001] The invention relates to the field of high-performance intelligent instruments and meters-new sensors in advanced manufacturing and automation, in particular to a high-precision and high-field-strength capacitive miniature electric field measurement sensor device based on piezoelectric effect. Background technique [0002] Sensors are an important basis for the development of modern intelligent industries. They are widely used in many fields such as industrial production, marine exploration, aerospace, etc., and play a vital role in realizing the intelligentization of industrial production. In particular, the principle and technology of miniaturized sensors have been extensively researched and industrially applied, and there are various types thereof, mainly including industrial current sensors, capacitive touch sensors, magnetic sensors, and the like. These diverse miniature sensors realize real-time monitoring and fault warning of system-level nodes ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/08
CPCG01R29/0878
Inventor 胡军薛芬何金良杨钧清王善祥张波曾嵘
Owner TSINGHUA UNIV
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