A mask splicing method of a metal mesh
A metal grid and photomask technology, applied in the field of photomask splicing of metal grids, can solve problems such as inability to meet product requirements
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Embodiment 1
[0023] A method for splicing a photomask of a metal grid, the method comprising the following steps:
[0024] Step 1: Split the metal grid to produce a metal grid that exceeds the maximum size of the mask. It is necessary to split the product at a suitable position first, and follow the split of each part of the product to meet the maximum effective area of the mask;
[0025] Step 2: To avoid line ghosting and line thickening at one time, a special design is made for the regional grid lines at the junction of each part of the product to avoid line ghosting and line thickening after splicing;
[0026] Step 3: Secondary exposure is used during production, first expose part A of the product, and use shading treatment for parts other than A, then expose part B of the product, and use shading treatment for parts other than B;
[0027] Step 4: Secondary avoiding line ghosting and line thickening. Since part A and part B of the product have overlapping overlapping areas, the settin...
Embodiment 2
[0034] A method for splicing a photomask of a metal grid, the method comprising the following steps:
[0035] Step 1: Split the metal grid to produce a metal grid that exceeds the maximum size of the mask. It is necessary to split the product at a suitable position first, and follow the split of each part of the product to meet the maximum effective area of the mask;
[0036] Step 2: To avoid line ghosting and line thickening at one time, a special design is made for the regional grid lines at the junction of each part of the product to avoid line ghosting and line thickening after splicing;
[0037] Step 3: Secondary exposure is used during production, first expose part A of the product, and use shading treatment for parts other than A, then expose part B of the product, and use shading treatment for parts other than B;
[0038] Step 4: Secondary avoiding line ghosting and line thickening. Since part A and part B of the product have overlapping overlapping areas, the settin...
Embodiment 3
[0045] A method for splicing a photomask of a metal grid, the method comprising the following steps:
[0046] Step 1: Split the metal grid to produce a metal grid that exceeds the maximum size of the mask. It is necessary to split the product at a suitable position first, and follow the split of each part of the product to meet the maximum effective area of the mask;
[0047] Step 2: To avoid line ghosting and line thickening at one time, a special design is made for the regional grid lines at the junction of each part of the product to avoid line ghosting and line thickening after splicing;
[0048] Step 3: Secondary exposure is used during production, first expose part A of the product, and use shading treatment for parts other than A, then expose part B of the product, and use shading treatment for parts other than B;
[0049]Step 4: Secondary avoiding line ghosting and line thickening. Since part A and part B of the product have overlapping overlapping areas, the setting...
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