Silicon nitride optical waveguide and manufacturing method thereof

Abstract

The invention discloses a silicon nitride optical waveguide and a manufacturing method thereof. According to the method, a second strip-type groove is filled with silicon nitride to form the silicon nitride optical waveguide, wherein when the second strip-type groove is filled with the silicon nitride, the silicon nitride grows along the bottom of the groove and the side wall of the groove in different directions and the stress among the silicon nitride grown in different directions is mutually reduced, so that the internal stress of the formed silicon nitride optical waveguide is reduced; compared with a silicon nitride optical waveguide formed by the silicon nitride growing in one direction, the silicon nitride optical waveguide has the advantage that the thickness is larger when being peeled off from a silicon-based integrated optical device; compared with a method of growing a silicon nitride optical waveguide in one direction, the method has the advantage that a thicker silicon nitride optical waveguide can be formed; and the thicker silicon nitride optical waveguide has the advantages that the light constraint effect can be enhanced to form a smaller optical spot, thereby facilitating the miniaturization of the optical device.

Description

technical field [0001] The present application relates to the technical field of integrated optics, in particular to a silicon nitride optical waveguide and a manufacturing method thereof. Background technique [0002] An optical waveguide is a dielectric device that guides light waves to propagate in it, also known as a dielectric optical waveguide. There are two types of optical waveguides: one is integrated optical waveguides, including planar (film) dielectric optical waveguides and strip dielectric optical waveguides, which are usually part of optoelectronic integrated devices (or systems), so they are called integrated optical waveguides ; The other is a cylindrical optical waveguide, usually called an optical fiber. [0003] There are many kinds of materials used to form integrated optical waveguides, and silicon nitride is one of the optical waveguide materials. [0004] At present, the thickness of silicon nitride optical waveguides used in silicon-based integrate...

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Problems solved by technology

[0004] At present, the thickness of silicon nitride optical waveguides used in silicon-based integrated optical devices is relatively thin, otherwise, silicon nitride optical waveguides will be peeled off from silicon-based integrated optical devices, mainly because silicon nitride and silicon-based materials The lattice mismatch between them is relatively large, resulting in high stress in the silicon nitride grown on the silicon-based material. Due to the existence of high stress, the thickness of the silicon nitride optical waveguide reaches a certain thickness, and the nitride Silicon optical waveguides can detach from silicon-based integrated optics, causing device failure

[0005] Therefore, the thickness of the existing silicon nitride optical waveguide used in the field of silicon-based integrated optics is relatively thin, so that the light confinement effect is weak, and the light spot formed by the outgoing light is large, which is not conducive to the miniaturization of optical devices

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