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Detection method for surface shape of multiple surfaces of transmission component

A technology of surface shape detection and transmission elements, applied in the field of measurement, can solve the problems of high precision and versatility in multi-surface detection of transmission elements, achieve high precision and large dynamic range, reduce cost requirements and cumbersomeness, and be universal good sex effect

Active Publication Date: 2019-02-05
CHINA JILIANG UNIV +1
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  • Application Information

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Problems solved by technology

[0003] In order to solve the technical problem that the multi-surface detection of transmission elements does not have high precision and versatility in the prior art, the present invention provides a high-precision and large dynamic range multi-surface surface detection method for transmission elements, which effectively reduces the measurement process. cost requirements and complexity

Method used

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  • Detection method for surface shape of multiple surfaces of transmission component
  • Detection method for surface shape of multiple surfaces of transmission component
  • Detection method for surface shape of multiple surfaces of transmission component

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Embodiment 1

[0019] like figure 1 As shown, a multi-surface shape detection method of a transmission component includes a camera 1, a component to be measured 2, a projection screen 3 and a computer. The component to be tested 2 is a workpiece through which light can transmit. The device under test 2 is placed between the projection screen 3 and the camera 1 . Adjust to make the lens of the camera 1 coincide with the optical axis of the component under test 2 and be perpendicular to the screen of the projection screen 3 . The front end of camera 1 has a small filter hole to overcome aperture imaging aberration. The projection screen 3 displays a group of sinusoidal fringe patterns with modulated light intensity in the horizontal and vertical directions. The sinusoidal fringes pass through the component under test 2, and the camera 1 can obtain a complete image of the component under test 2, and collect the deformed fringes after imaging. The camera 1 and the projection screen 3 are resp...

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Abstract

The invention provides a detection method for surface shapes of multiple surfaces of a transmission component and relates to the technical field of measurement. The detection method comprises the steps of: on the premise of measuring a wave aberration of a to-be-detected component by use of a reverse hartmann light path detection device, adding multiple groups of different surface shape errors tothe surface shape of each surface of the to-be-detected component in a light ray tracing model by use of a modeled detection system established by a computer to obtain the corresponding wave aberration; solving a minimum difference value between the wave aberration and an actually measured wave aberration in the modeled detection system; and finally obtaining an actual surface shape error of the to-be-detected transmission component. With the detection method for the surface shapes of multiple surfaces of the transmission component, the technical problems in the prior art that detection for multiple surfaces of the transmission component does not possess high precision and universality. The invention has the beneficial effect that the detection method with high precision and large dynamicrange is provided for detection of the surface shapes of multiple surfaces of the transmission component.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a method for measuring surface shape errors of multiple surfaces of a transmissive element by using light aberration technology. Background technique [0002] With the development of optical technology, the application of optical instruments has spread to all aspects of life. As an important component of optical instruments, transmission elements with free-form surfaces are widely used in various fields. Therefore, the quantitative evaluation of the processing error and the overall quality of the transmission element becomes very important. The surface shape detection of optical components is essential in the processing and assembly of optical components. Chinese patent application publication number CN107560564A, the application publication date is January 9, 2018, and the invention patent application document named "A free-form surface detection method and system" disclo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B11/25
CPCG01B11/2433G01B11/25
Inventor 王道档尹雅梅孔明赵军许新科雷李华刘维郭天太唐冬梅
Owner CHINA JILIANG UNIV
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