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Semiconductor device positioning system and method for semiconductor device positioning

A positioning system and semiconductor technology, applied in semiconductor/solid-state device manufacturing, measuring devices, general control systems, etc., can solve problems such as high acceleration force

Active Publication Date: 2021-09-28
NEXPERIA BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, increasing the acceleration of the semiconductor device driver platform generally results in higher acceleration forces and thus higher reaction forces on the support structure of the semiconductor device driver platform

Method used

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  • Semiconductor device positioning system and method for semiconductor device positioning
  • Semiconductor device positioning system and method for semiconductor device positioning
  • Semiconductor device positioning system and method for semiconductor device positioning

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Embodiment Construction

[0031] It will be readily understood that the elements of the embodiments described herein and those illustrated in the drawings can be arranged and design in a wide variety of different configurations. Therefore, the following more detailed descriptions of various embodiments represented in the drawings are not intended to limit the scope of the disclosure, but only the representatives of various embodiments. Although various aspects of the embodiments are presented in the drawings, unless otherwise indicated, the drawings are not necessarily drawn.

[0032] The invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. The described embodiments should be considered only illustrative and non-limiting. Accordingly, the scope of the invention is indicated by the appended claims. All changes in the meaning of an equivalent solution that falls within the claims are covered by the scope of the claims.

[0033] Ref...

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PUM

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Abstract

A positioning system and method for positioning a semiconductor device are disclosed. In an embodiment, a positioning system for positioning a semiconductor device includes a long-stroke stage configured to move in a plane relative to a support structure; and a short-stroke stage attached to the The long-stroke platform is configured to carry a semiconductor device and is rotatable within the plane. The long-stroke platform acts as a balancing mass between the short-stroke platform and the support structure.

Description

Background technique [0001] A new component such as an integrated circuit (IC) or discrete transistor, etc. is produced by mass production by manufacturing a plurality of components on the substrate. For example, various IC manufacturing processes are implemented to manufacture electronics circuits on a silicon wafer. Typically, hundreds or thousands of elements or IC grains are fabricated on a single wafer. [0002] During the IC manufacturing process, the semiconductor device is positioned or placed in the semiconductor device such that various operations can be performed on the semiconductor device. For example, the semiconductor device positioning system can include a semiconductor device holding a semiconductor device holding a semiconductor device at a particular location, and / or a semiconductor device drive platform including a mobile semiconductor device to perform semiconductor processing (e.g., deposition processing or etching processing). However, increasing the accel...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G05B19/404
CPCG03F7/70766G03F7/70716G01D21/00G03F7/70725G05B19/404H01L21/67259H01L21/681H01L21/68764H01L21/68785
Inventor 泰吉斯·科尼科涅约瑟夫·柏图斯·威廉姆斯·斯托克曼
Owner NEXPERIA BV