Vacuum continuous coating system for strip material and transition cabin unit used by same

A technology of vacuum coating and transition chamber, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., to achieve the effect of meeting continuous coating production, reducing the scope and difficulty of vacuuming, and reducing the complexity of equipment

Pending Publication Date: 2019-02-15
PANZHIHUA UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the present invention also provides a system capable of carrying out continuous vacuum coating on strips to solve the problem that all process equipment and chambers need to be placed in a fully enclosed large vacuum chamber in the previously used coating system

Method used

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  • Vacuum continuous coating system for strip material and transition cabin unit used by same
  • Vacuum continuous coating system for strip material and transition cabin unit used by same
  • Vacuum continuous coating system for strip material and transition cabin unit used by same

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Embodiment Construction

[0037] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0038] like Figure 1 to Figure 14As shown in the present invention, the transition cabin unit for strip vacuum continuous coating includes a cabin body 1 with two open ends enclosed by surrounding wall plates, and the two ends of the cabin body 1 are respectively For the feeding port and the discharging port of the strip 2, at least one partition plate 3 is arranged in the cabin 1, and a strip-shaped through hole 4 that allows the strip material 2 to pass through is opened through the partition plate 3; At least one side of the plate 3 is provided with a set of sealing mechanisms. The sealing mechanism includes an upper sealing roller 5, a lower sealing roller 6 and an end sealing plate 7. The upper sealing roller 5 and the lower sealing roller 6 are mirror-symmetrically arranged on the strip. 2 on both sides of the conveying track, and the out...

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Abstract

The invention discloses a vacuum continuous coating system for a strip material and a transition cabin unit used by the same, belongs to the technical field of vacuum continuous coating, provides a transition cabin unit for vacuum continuous coating of the strip material in order to meet the vacuum requirements needed by the vacuum coating system, and further provides a system capable of conducting continuous vacuum coating on the strip material so as to solve the problem that in an existing coating system, all technological devices and cabins need to be arranged in a full-closed large vacuumcabin body. According to the vacuum continuous coating system for the strip material and the transition cabin unit used by the same, the transition cabin units can be only arranged on the conveying tracks on the two sides of a strip material entrance and exit vacuum coating area, therefore, conveying channels corresponding to the conveying tracks of the strip material can be isolated and sealed, and a vacuum environment formed in the vacuum coating area is effectively guaranteed; and therefore a full-closed large vacuum cabin body does not need to be arranged to contain an unwinding mechanism,a winding mechanism, the vacuum coating area and a whole conveying channel of the strip material in an enclosing mode.

Description

technical field [0001] The invention relates to the technical field of vacuum continuous coating, in particular to a strip vacuum continuous coating system and a transition cabin unit used in the system. Background technique [0002] A strip vacuum coating device commonly used in the industry is a flat-bed vacuum device. The device consists of a pretreatment chamber, a coating chamber, an unwinding mechanism, a winding mechanism and a vacuum system. All process equipment and chambers of the equipment are required. All are placed in a fully enclosed large vacuum chamber to meet the requirements of vacuum coating. The equipment has the following defects in actual production: [0003] A. The structure of the equipment is complex and the system is huge. At the same time, all the equipment needs to be placed in the vacuum system, resulting in a large area of ​​​​the equipment and high equipment manufacturing costs. [0004] B. The large vacuum chamber of the equipment is large,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C16/54
CPCC23C14/562C23C16/545
Inventor 廖先杰赖奇刘翘楚赵海泉李俊翰邹宇范立男刘挺
Owner PANZHIHUA UNIV
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