High-speed detection method for three-dimensional topography of micro-nano structure based on structured light

A technology of micro-nano structure and three-dimensional topography, applied in measurement devices, optical devices, instruments, etc., can solve the problems of large errors, unfavorable detection, low detection efficiency, etc., and achieve good application prospects, high-speed and high-precision three-dimensional topography. The effect of detection

Active Publication Date: 2019-02-15
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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The three-dimensional shape detection technology based on structured light adopts the method of phase shift and vertical scanning to obtain the image modulat

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  • High-speed detection method for three-dimensional topography of micro-nano structure based on structured light

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Embodiment Construction

[0017] The present invention will be further described in detail below in conjunction with the accompanying drawings and working principle.

[0018] The present invention is a high-speed detection method of three-dimensional shape of micro-nano structure based on structured light, such as figure 1 As shown, the white light source 1 emits 550nm white light, which is collimated by tube lens 1 2 and then irradiated onto the structured light projection device 3; the projected light is reflected to the microscope objective lens 8 through tube lens 2 4 and half mirror 7 The object 9 to be measured is irradiated to the surface of the object 9 to be measured; the object 9 to be measured is scanned horizontally under the action of the PZT scanning table 10, wherein the reflected light of the object to be measured 9 passes through the half mirror 7 and the tube lens 3 6 and is captured by the black and white CCD camera 5 collection. The sinusoidal grating fringes projected by the struc...

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Abstract

The invention is a high-speed detection method for three-dimensional topography of micro-nano structure based on structured light. Sinusoidal grating stripes projected by a structured light projectiondevice form an angle [theta] with optical axis, are then projected onto the surface of the object to be tested, and an image is acquired by a CCD camera. The acquired image is calculated through a Fourier transform filtering algorithm to obtain a modulation distribution of the sinusoidal grating on the surface of the object, so that a modulation curve of each pixel point at different horizontal scanning positions can be obtained. Finally, the topography recovery can be realized by extracting a position of the maximum value of the modulation. The high-speed detection method for the three-dimensional topography of the micro-nano structure based on the structured light can not only realize continuity measurement of the non-periodic micro-nano structure, but also retain advantages of verticalmeasurement, and has high detection precision and efficiency.

Description

technical field [0001] The invention belongs to the technical field of optical microscopic imaging and precision measurement, and in particular relates to a high-speed detection method for three-dimensional morphology of micro-nano structures based on structured light. Background technique [0002] In recent years, the application of micro-nano structures in the fields of microelectronics, biotechnology, aerospace, metamaterials and other technologies has developed rapidly, and has a great influence on social development and economic level. Sophisticated micro-nano structures will be the most important in the next period. A hotspot of technological development. The three-dimensional appearance of micro-nano devices is directly related to the performance characteristics, reliability and functional analysis of the product. High-precision and fast micro-nano detection methods and technologies are important means to obtain the three-dimensional appearance of micro-nano structure...

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 位浩杰唐燕谢忠业刘磊赵立新胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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