Fixing device and fixing method for femtosecond laser processing carbon nanotube film
A carbon nanotube film and femtosecond laser processing technology, which is applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problems that mechanical clamping cannot meet the needs of femtosecond laser processing carbon nanotube film, and achieve stability And reliable fixation, the effect of improving reliability
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specific Embodiment approach 1
[0061] Specific implementation mode one: combine Figure 1 to Figure 9 Describe this embodiment, the fixing device for femtosecond laser processing carbon nanotube thin film of this embodiment, it comprises base 1, vacuum adsorption plate 2, annular air chamber 3, electrostatic adsorption platform 4, vacuum adsorption gas nozzle 5, Fast electrode socket 6 and fast electrode socket 7;
[0062] The upper plane 1-1 of the base 1 is provided with a coaxial first stepped hole 1-X, a second stepped hole 1-Y and a third stepped hole 1-Z sequentially from top to bottom in the vertical direction;
[0063] Between the third stepped hole 1-Z inside the base 1 and the lower plane 1-2 of the base 1, there is a gas outlet 1-3 and an electrode socket installation hole, and the quick electrode socket 6 is inserted into the electrode of the base 1. In the socket installation hole;
[0064] The vacuum adsorption plate 2 is sealed and installed in the second stepped hole 1-Y, and the vacuum ad...
specific Embodiment approach 2
[0080] Specific implementation mode two: combination Figure 8 To illustrate this embodiment, the upper end surface of the lower substrate 4-2 of the electrostatic adsorption platform 4 of this embodiment is provided with a lower substrate positioning platform 4-1-1, and the lower end surface of the upper substrate 4-1 is provided with a lower substrate positioning table 4-1-1. The upper substrate positioning groove 4-1-2 matched with the platform 4-1-1, the upper substrate 4-1 is connected with the lower substrate 4 through the upper substrate positioning groove 4-1-2 and the lower substrate positioning platform 4-1-1 which cooperate with each other -2 connections.
[0081] In this way, in order to ensure the stability of the electrode plate 4-3 built between the upper substrate 4-1 and the lower substrate 4-2, after positioning, the upper part of the upper substrate 4-1 can also be aligned by means of adhesive, brazing, etc. The substrate positioning groove 4-1-2 is fixed w...
specific Embodiment approach 3
[0082] Specific implementation mode three: combination figure 1 and image 3 The present embodiment will be described. A base outer edge 8 is provided at the lower end of the base 1 of the present embodiment.
[0083] In this way, the entire fixing device is connected to the femtosecond laser processing translation table through the outer edge 8 of the base. Other compositions and connections are the same as those in Embodiment 1 or Embodiment 2.
[0084] The outer edge 8 of the base in this embodiment is preferably set in a ring shape and fixed on the metal base 1 by welding or other reliable methods. Other reliable methods include various fasteners, such as screws, bolts or other The same purpose can be achieved for the connecting piece, and the material of the fastener can be any suitable material, not limited to one or more of materials such as carbon steel and stainless steel.
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Abstract
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