High-frequency resonance piezoelectric inertial drive linear displacement platform

Abstract

The present invention discloses a high-frequency resonance piezoelectric inertial drive linear displacement platform. An unsymmetrical inertial promoter formed by a base body, a first piezoelectric driver, a second piezoelectric driver, a main inertial body, an assistant inertial body obtains two effective natural vibrations consisting of reversed natural vibration and in-phase natural vibration to change the quality ratio of the base body, the main inertial body and the assistant inertial body to regulate the ratio of the reversed natural vibration frequency and the in-phase natural vibrationfrequency of the inertial promoter to be 1:2, two multi-layer stackable piezoelectric ceramics are employed as piezoelectric actuators to respectively excite simple harmonic vibrations in two inherent frequencies to allow the base body to combine an unsymmetrical vibration waveform in a resonance state, and the asymmetric sliding friction between the slide ports at two sides of the base body andguide rails at two side of a pedestal is employed to drive the inertial promoter to perform continuous linear displacement in a one-way direction along the guide rails. The high-frequency resonance piezoelectric inertial drive linear displacement platform is simple in structure and convenient to excite to further improve the integrated drive performances of a traditional inertial drive mechanism.

Description

technical field [0001] The invention relates to the field of piezoelectric precision-driven micro-displacement platform equipment, in particular to a high-frequency resonance piezoelectric inertia-driven linear displacement platform. Background technique [0002] With the rapid development of micro-nano technology, there are more and more occasions involving precise positioning operations on tiny objects, such as the mobile positioning of projection exposure in semiconductor manufacturing, the assembly and characterization of nanostructures in materials science, and the capture and injection of cell bacteria in biomedical engineering. etc. These occasions require the use of high-performance drive mechanisms to achieve precision motion with nanometer-level high-resolution and millimeter-level large strokes. Piezoelectric drive has outstanding advantages such as high displacement resolution, high energy density, fast response speed, and strong anti-interference ability, and oc...

AI Technical Summary

Problems solved by technology

Due to the difference in working principles, the above two types of piezoelectric drive mechanisms are often unable to simultaneously realize the dual functions of power drive and precision positioning through a single structural design, and it is difficult to meet the increasingly complex application requirements of precision positioning operations.

[0004] Because the traditional piezoelectric inertial drive mechanism can only work in a low-frequency, low-amplitude non-resonant state, the power output capability is low, so the application is limited

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