High-precision two-dimensional worktable Z-axis error compensating method and system thereof

An error compensation and workbench technology, applied in the field of surface topography measurement, can solve problems such as high cost, harsh environmental requirements, and difficult industrial applications
CN109443203AActive Publication Date: 2019-03-08HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Publication Date
2019-03-08

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Abstract

The invention discloses a high-precision two-dimensional worktable Z-axis error compensating method and a system thereof, wherein the Z-axis error compensating device comprises a capacitor displacement sensor (602) and a reference surface (604). The compensating device is used in cooperation with a two-dimensional worktable, wherein the reference surface (604) is used for being set in a target area of the two-dimensional worktable. The capacitor displacement sensor (602) is used for obtaining the displacement of the reference surface (604) in a Z-axis direction through detecting the distance between the capacitor displacement sensor (602) and the reference surface (604). The displacement is the Z-axis error at the target area caused by the two-dimensional worktable, thereby compensating the Z-axis error of the two-dimensional worktable based on the displacement. According to the method and the system, through improving the principle of the Z-axis error compensating method and a means for measuring the Z-axis error, the reference error in the Z-axis direction can be effectively overcome, thereby realizing measurement and compensation of the Z-axis direction error caused by thermal deformation, guide rail precision, mounting error, etc.
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Description

technical field

[0001] The invention belongs to the technical field of surface topography measurement, and more specifically relates to a high-precision Z-axis error compensation method and system for a two-dimensional workbench, which can effectively compensate Z-axis errors. Background technique

[0002] The three-dimensional surface topography measuring instrument needs the corresponding two-dimensional scanning table to have the characteristics of high positioning accuracy and stable and reliable motion plane. Most of the existing precision two-dimensional worktables use a superimposed two-dimensional scanning platform. Due to the large vertical distance between the stage and the actual X-axis and Y-axis motion modules, the Abbe error is relatively large. And it is more difficult to move a stable datum. Due to the long stroke of the workbench, the accuracy of the displacement of the workbench is greatly affected by the straightness error and mutual influence of the resp...

Claims

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