High-precision two-dimensional worktable Z-axis error compensating method and system thereof

An error compensation and workbench technology, applied in the field of surface topography measurement, can solve problems such as high cost, harsh environmental requirements, and difficult industrial applications

CN109443203AActive Publication Date: 2019-03-08HUAZHONG UNIV OF SCI & TECH
4 Cites 9 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2019-03-08

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a high-precision two-dimensional worktable Z-axis error compensating method and a system thereof, wherein the Z-axis error compensating device comprises a capacitor displacement sensor (602) and a reference surface (604). The compensating device is used in cooperation with a two-dimensional worktable, wherein the reference surface (604) is used for being set in a target area of the two-dimensional worktable. The capacitor displacement sensor (602) is used for obtaining the displacement of the reference surface (604) in a Z-axis direction through detecting the distance between the capacitor displacement sensor (602) and the reference surface (604). The displacement is the Z-axis error at the target area caused by the two-dimensional worktable, thereby compensating the Z-axis error of the two-dimensional worktable based on the displacement. According to the method and the system, through improving the principle of the Z-axis error compensating method and a means for measuring the Z-axis error, the reference error in the Z-axis direction can be effectively overcome, thereby realizing measurement and compensation of the Z-axis direction error caused by thermal deformation, guide rail precision, mounting error, etc.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention belongs to the technical field of surface topography measurement, and more specifically relates to a high-precision Z-axis error compensation method and system for a two-dimensional workbench, which can effectively compensate Z-axis errors. Background technique

[0002] The three-dimensional surface topography measuring instrument needs the corresponding two-dimensional scanning table to have the characteristics of high positioning accuracy and stable and reliable motion plane. Most of the existing precision two-dimensional worktables use a superimposed two-dimensional scanning platform. Due to the large vertical distance between the stage and the actual X-axis and Y-axis motion modules, the Abbe error is relatively large. And it is more difficult to move a stable datum. Due to the long stroke of the workbench, the accuracy of the displacement of the workbench is greatly affected by the straightness error and mutual influence of the resp...

Examples

Embodiment Construction

[0066] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0067] The high-precision Z-axis error compensation method of the two-dimensional workbench in the present invention, in general, is to set the reference plane 604 on the target area of ​​the two-dimensional workbench to be compensated for the Z-axis error, and then use the capacitive displacement sensor 602 to pass the detection The distance between the capacitive displacement sensor 602 and th...