A three-dimensional reconstruction method of a scanning electron microscope image

A 3D reconstruction and scanning electron microscope technology, applied in image data processing, 3D modeling, instruments, etc., can solve the problems of focusing measurement value error, affecting the accuracy of 3D reconstruction, and the sample platform cannot move up and down absolutely, and achieves a small amount of calculation. , the effect of simple algorithm

Active Publication Date: 2019-03-08
JIANGSU JICUI MICRO NANO AUTOMATION SYST & EQUIP TECH RES INST CO LTD
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Problems solved by technology

However, in the process of acquiring a large number of graphics sequences by SSF, the sample platform cannot move up and down absolutely due to the vibration of the actuator, and the image frame moves sideways, which leads to errors in the focus measurement value, thus affecting the accuracy of 3D reconstruction

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  • A three-dimensional reconstruction method of a scanning electron microscope image
  • A three-dimensional reconstruction method of a scanning electron microscope image
  • A three-dimensional reconstruction method of a scanning electron microscope image

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[0033] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the examples given are not intended to limit the present invention.

[0034] refer to figure 2 As shown, the present invention discloses a three-dimensional reconstruction method of a scanning electron microscope image, comprising the following steps:

[0035] Step S101, setting the image number threshold, and selecting a template area for the first frame of the image collected by the SEM;

[0036] Step S102, moving the sample platform with a predefined step length, acquiring a real-time image, and performing template matching using the template region of the first frame. The coefficient matching method matches the relative value of the template to its mean with the correlation value of the image to its mean, 1 means a perfect match, -1 means a ba...

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Abstract

The invention discloses a three-dimensional reconstruction method of a scanning electron microscope image. The method comprises the following steps that a threshold value of the number of images is set; a template area is selected for the first frame of the image captured by the SEM; the predefined step size is used to move the sample platform to obtain the real-time image, and the template regionof the first frame is used for template matching; the matched image is added into the matched image sequence; for the matching image sequence, the region of interest is selected and the modified Laplace transform is used to compute the focus measurement of each pixel; Gaussian interpolation is used to calculate the maximum focus measurement value of each pixel, and the height of the correspondingpoint is calculated according to the maximum focus measurement value to obtain the three-dimensional point cloud; according to the three-dimensional point cloud, the interpolation fitting is carriedout on the three-dimensional graphics to achieve the three-dimensional reconstruction.

Description

technical field [0001] The invention relates to the field of electron microscope image processing, in particular to a method for three-dimensional reconstruction of scanning electron microscope images Background technique [0002] Scanning electron microscopy (SEM), as a large-scale analytical instrument for microscopic morphology observation and microstructural analysis, has been widely used in the precise measurement of nanomaterial size, performance characterization, and 3D morphology recovery of materials. In addition, the use of SEM images as visual sensors has greatly helped the development of automated nanomanipulation, such as automatic detection of IC chips, automatic picking up of nanowires, and automatic measurement of nanowire impedance characteristics with four probes, freeing humans from tedious tasks. It is liberated from manual nanometer operation, which greatly improves work efficiency. However, due to the lack of height information in SEM images, the end e...

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Application Information

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IPC IPC(8): G06T17/00G06K9/62
CPCG06T17/00G06V10/751
Inventor 朱军辉徐伟汝长海孙钰
Owner JIANGSU JICUI MICRO NANO AUTOMATION SYST & EQUIP TECH RES INST CO LTD
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