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OLED display device evaporation method, OLED display device and evaporation equipment

A display device and evaporation technology, which is applied in the manufacture of electric solid-state devices, semiconductor devices, and semiconductor/solid-state devices, etc., can solve the problems of low yield and high cost of OLED display devices, achieve small production tact, reduce waiting time, enhance performance effect

Active Publication Date: 2019-03-08
YUNGU GUAN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] As an emerging display technology, OLED display technology has attracted much attention from the market, but due to its low yield rate in mass production, the cost of OLED display devices is higher than other display devices

Method used

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  • OLED display device evaporation method, OLED display device and evaporation equipment
  • OLED display device evaporation method, OLED display device and evaporation equipment
  • OLED display device evaporation method, OLED display device and evaporation equipment

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Embodiment approach

[0038] At least two adjacent layers of HIL, HTL, EML, ETL, ELI, and Cathode can be evaporated in the same evaporation chamber, and the evaporation method of other functional layers is the same as the prior art.

[0039] In order to achieve a better control effect on the yield rate and ensure a higher production capacity, based on the above experiments, the functional layers that have a more critical impact on the yield rate are combined and evaporated. Specifically, the HTL, EML, and ETL can be combined Any two are evaporated in the same evaporation chamber, and the evaporation method of other functional layers is the same as that of the prior art. It is also possible to vapor-deposit only EIL and Cathode in the same evaporation chamber, and the evaporation method of other functional layers is the same as that of the prior art. It should be noted that the evaporation method in the embodiment of the present invention is not limited to the above-mentioned evaporation method. In ...

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PUM

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Abstract

The invention discloses an OLED display device evaporation method, an OLED display device and evaporation equipment. A hole transporting layer, a luminous layer and an electron transfer layer are combined in an evaporation chamber to be subjected to evaporation, or the hole transporting layer and the electron transfer layer are split and then a partial hole transporting layer, the electron transfer layer and a partial electron transfer layer are combined and subjected to evaporation, so that corresponding waiting time between different functional layers subjected to evaporation in the same evaporation chamber is reduced, injection and transmission capabilities as well as recombination efficiency between current carriers are enhanced, and then performance of a device is enhanced and productyield is increased; meanwhile, only partial functional layers are combined, so that influence on a production cycle is relatively small, and relatively high capacity also can be guaranteed.

Description

technical field [0001] The invention relates to the field of preparation of OLED display devices, in particular to an evaporation method for OLED display devices, OLED display devices and evaporation equipment. Background technique [0002] As an emerging display technology, OLED display technology has attracted much attention from the market, but due to its low yield rate in mass production, the cost of OLED display devices is higher than other display devices. [0003] At present, in the mass production process of OLED display devices, the evaporation part is used as the core process section, and the commonly used schemes in the evaporation section are as follows: figure 1 As shown, that is, only one layer of functional layer is evaporated in each evaporation chamber, which can reduce the production cycle (ie T1-T6), thereby increasing the overall production capacity. Contents of the invention [0004] In view of this, the present invention provides an evaporation metho...

Claims

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Application Information

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IPC IPC(8): H01L51/50H01L51/56
CPCH10K71/16H10K50/00H10K50/15
Inventor 吕磊刘胜芳张义波张浩杰
Owner YUNGU GUAN TECH CO LTD
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