Laser beam terminal pointing detection and correction method and laser processing device

Abstract

The invention relates to a laser beam terminal pointing detection and correction method and a laser processing device. The laser beam terminal pointing detection and correction method and the laser processing device are used for solving the problem that in the process of laser processing, because of long time operation of laser equipment, a laser beam generates pointing offset at a processing terminal caused by emitting beam pointing offset of a laser device, temperature excursion and time excursion of a galvanometric scanner and the other reasons to affect the position accuracy of a machinedfigure. According to a principle of optical path conjugation, the spatial position of a detection and correction device of laser beam terminal pointing is arranged and calibrated, the light spot position offset amount in a view field is equal to the light spot position offset amount of the actual laser processing light spot position, so that the light spot offset situation of the laser processed surface is characterized through the light spot position of the detection device; and the laser beam terminal pointing detection and correction method and the laser processing device can be widely usedin laser fine surface manufacturing, hole making, fine cutting aspects of aerospace field, automobile field, 3C field, optoelectronic field, mold field and other fields.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and in particular relates to a laser beam terminal pointing detection and correction method and a laser processing device. Background technique [0002] Laser processing is an emerging special processing method and has become an inevitable choice to replace traditional manufacturing methods. Using the characteristics of the interaction between laser beams and substances, materials can be cut, welded, surface treated, drilled and micromachined. A traditional laser processing device mainly includes a laser light source for generating a laser beam and a galvanometer system for guiding the laser beam to the workpiece to be processed. The galvanometer system includes a control system and two sets of fast mirrors. In the process of processing, the instability of laser beam pointing will reduce the position accuracy of laser processing. At present, because the existing domestic equipment belon...

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Problems solved by technology

[0004] In order to solve the problem that offline front-end measurement cannot monitor feedback correction online and cannot guarantee the influence of external environment and subsequent optical devices on laser beam during processing, the present invention proposes a laser beam terminal pointing detection and correction method and a laser processing device

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