Ellipsometer device and detection method based on device

Abstract

The invention relates to an ellipsometer device and a detection method based on the device. An implementation manner of the device is characterized in that a laser in the device sends out laser; the laser enters a first convergent lens after being modulated by an acoustic optical modulator; the first convergent lens focuses and couples the laser to an optical fiber; the laser is collimated by a collimating lens and then enters a polarizer after outgoing from the optical fiber; the laser outgoing from the polarizer is focused by a second convergent lens, penetrates through a half mirror and then is irradiated on a to-be-detected object through a high-numerical aperture lens; the laser reflected by the to-be-detected object is reflected to a polarization analyzer by the half mirror after passing through the high-numerical aperture lens; the laser outgoing from the polarization analyzer is irradiated to a photosensitive unit after passing through a field lens; and the photosensitive unitobtains light intensity of the laser to determine an ellipsometry parameter. The implementation manner is capable of measuring polarization reflection characteristics of samples under different reflection angles, azimuth angles, temperatures and wavelengths.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to an ellipsometer device and a detection method based on the device. Background technique [0002] The principle of the ellipsometer is to irradiate a sample with light of a determined polarization state, and to calculate the optical properties of the sample by measuring the polarization state of the reflected light. An ellipsometer is an optical measurement instrument used to probe film thickness, optical constants, and the microstructure of materials. Due to the high measurement accuracy, suitable for ultra-thin films, non-contact with the sample, no damage to the sample, and no need for vacuum, the ellipsometer is an extremely attractive measuring instrument. [0003] Ellipsometer to measure reflectivity R p and reflectance R s The complex ratio of , where R p is the reflectance of P polarized light, R s is the reflectance of S polarized light. R p and R ...

AI Technical Summary

Problems solved by technology

[0004] There are many types of ellipsometers currently on the market, and the ellipsometers provided are all constructed separately from the illumination arm, detection arm, and sample platform, and there is no ellipsometer that can simultaneously control the reflection angle, azimuth, temperature, and wavelength. partial instrument method;

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