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A technology of spiral inductors and inductances, applied in the field of MEMS adjustable suspended spiral inductors, can solve problems such as complex structures, difficult applications, discrete and discontinuous inductance values, and achieve the effect of reducing process complexity
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A technology of spiral inductors and inductances, applied in the field of MEMS adjustable suspended spiral inductors, can solve problems such as complex structures, difficult applications, discrete and discontinuous inductance values, and achieve the effect of reducing process complexity
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[0019] The MEMS adjustable suspended spiral inductor that the present invention proposes, its structure is as follows figure 1 As shown, including substrate 1 (such as figure 2 ), substrate isolation layer 2, ground wire 3, signal transmission line 4, left spiral inductor 5, right spiral inductor 6, upper electrode 7, lower electrode 11 and air bridge 10. The substrate isolation layer 2 is placed on the substrate 1, the upper electrode 7 and the lower electrode 11 are placed on the substrate isolation layer 2, and the electrode isolation layer 8 is arranged between the upper electrode 7 and the lower electrode 11. There are two signal transmission lines 4, and the two signal transmission lines are respectively placed on the substrate isolation layer 2 on the left and right sides of the lower electrode 11. The left spiral inductor 5 and the right spiral inductor 6 are respectively located above the two signal transmission lines 4 on the left and right sides. Such as figure...
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Abstract
The invention relates to an MEMS adjustable suspension spiral inductor, and belongs to the technical field of a microcomputer electric device and communication. An upper electrode is arranged betweentwo segments of suspension spiral inductors, the distance between the upper electrode and a lower electrode is adjusted by controlling a driving signal between the upper electrode and the lower electrode, the magnetic flow distribution is changed by changing transverse distance and longitudinal distance between metal coils in a left-side suspension spiral inductor and a right-side suspension spiral inductor and by changing longitudinal distance between the two suspension spiral inductors and a signal transmission line, an inductance value is adjusted, and the required inductance is obtained. With the adoption of the adjustable suspension spiral inductor, the adjustable suspension spiral inductor can be compatible with other MEMS devices for fabrication and is applied to the communication field of a tunable intelligent antenna. Compared with an adjustable inductor, the adjustable suspension spiral inductor has the advantages that the structural area can be reduced, the parasitic effectis reduced, the process flow is simplified, and continuous and adjustable inductance value is achieved.
Description
technical field [0001] The invention relates to a MEMS adjustable suspended spiral inductor, which belongs to the technical field of microelectromechanical devices and communication. Background technique [0002] Inductors are the basic devices for filtering, tuning, amplification, impedance coupling and frequency coupling. On-chip integrated inductors with high quality factors can improve the performance of RF units such as RF filters, power amplifiers, low-noise amplifiers, phase-locked loops, and antennas, thereby improving the performance of communication systems and reducing the size of the system. Furthermore, in a communication system that supports multiple working frequency bands and multiple standards, the adjustable inductor can obtain different inductance values by changing the structure, shape, length, etc. of the inductor according to the different operating frequencies required by the system. Other passive components such as resistors form an impedance match...
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