A mems adjustable suspended spiral inductor
A technology of spiral inductors and inductances, applied in the field of MEMS adjustable suspended spiral inductors, can solve problems such as complex structures, difficult applications, discrete and discontinuous inductance values, and achieve the effect of reducing process complexity
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[0019] The MEMS adjustable suspended spiral inductor that the present invention proposes, its structure is as follows figure 1 As shown, including substrate 1 (such as figure 2 ), substrate isolation layer 2, ground wire 3, signal transmission line 4, left spiral inductor 5, right spiral inductor 6, upper electrode 7, lower electrode 11 and air bridge 10. The substrate isolation layer 2 is placed on the substrate 1, the upper electrode 7 and the lower electrode 11 are placed on the substrate isolation layer 2, and the electrode isolation layer 8 is arranged between the upper electrode 7 and the lower electrode 11. There are two signal transmission lines 4, and the two signal transmission lines are respectively placed on the substrate isolation layer 2 on the left and right sides of the lower electrode 11. The left spiral inductor 5 and the right spiral inductor 6 are respectively located above the two signal transmission lines 4 on the left and right sides. Such as figure...
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