Method for monitoring development process in real time

Abstract

The invention provides a method for monitoring a development process in real time. The method comprises the steps of determining the position of a photoelectric receiver; irradiating a latent image grating with laser and receiving a diffracted light signal of the latent image grating with the photoelectric receiver when the latent image grating starts to develop; obtaining an intensity change curve of diffracted light according to the diffracted light signal; and finally determining a development cutoff point according to the curve. By adopting the method, the progress of development can be visually known by observing the intensity change curve of the diffracted light on a displayer, when the intensity of the diffracted light in the curve is reduced to just tend to be gentle, namely the development cut-off point, the development is stopped, and obtaining of a high-quality holographic grating mask is facilitated. The method is simple and strong in operability and reproducibility. When the method is applied to the development of the high-quality holographic grating mask, the research efficiency can be improved and the good holographic grating mask can be obtained.

Description

technical field [0001] The invention relates to the field of spectrum technology, and more specifically, relates to a method for real-time monitoring of a development process during the fabrication of a holographic grating. Background technique [0002] In the holographic grating manufacturing process, the exposed latent image grating is put into an alkaline solution for etching, and the latent image in the photoresist is transformed into a relief pattern. This process is development. Development is the last process step in the formation of holographic grating grooves, and it is one of the important process parameters that need to be controlled. If the development time is insufficient or the development time is long, ideal grating grooves cannot be obtained. The traditional method is to use a fixed exposure amount, correct it repeatedly through a large number of experiments, and finally obtain the best process conditions. Because there are many process conditions that affec...

AI Technical Summary

Problems solved by technology

Because there are many process conditions that affect the quality of holographic gratings, many of which will fluctuate during the experiment, making it difficult to judge and control the experimental results, so the traditional method requires a large amount of experimental work and a long research period, and often ends up being unresolved. Not getting good quality holographic gratings

Images