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High-precision three-dimensional angle measurement method and device based on reflective grating

A reflective grating and angle measurement technology, which is applied in the direction of measuring devices, optical devices, and measuring angles, can solve problems such as difficult angle changes, achieve the effects of simple calculation methods, increase the measurement distance, and eliminate principle errors

Active Publication Date: 2020-08-07
哈尔滨超精密装备工程技术中心有限公司
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Problems solved by technology

Although traditional optical methods such as circular grating method, interference method, ring laser method and laser self-collimation can obtain accurate angle measurement values, it is difficult to measure the angle change values ​​in three directions at the same time due to the limitation of the measurement principle. Therefore, the method and device for three-dimensional angle measurement are yet to be studied.

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  • High-precision three-dimensional angle measurement method and device based on reflective grating
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  • High-precision three-dimensional angle measurement method and device based on reflective grating

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Embodiment Construction

[0025] The present invention will be described in detail below with reference to the drawings and specific embodiments.

[0026] The high-precision three-dimensional angle measurement method based on the reflective grating of the present invention includes the following steps:

[0027] ① The beam emitted by the laser passes through the collimating objective lens to form a collimated beam and exit;

[0028] ②, ① The collimated light beam is incident on the one-dimensional plane reflection grating after the non-grating part of the specially processed one-dimensional plane transmission grating, which produces a positive first-order diffracted beam and a negative first-order diffracted beam, which requires one-dimensional plane transmission The grating constants of the grating and the one-dimensional plane reflection grating are the same;

[0029] The positive first-order diffracted beams and negative first-order diffracted beams described in ③ and ② are incident on the grating surface of...

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Abstract

The invention provides a high-accuracy three-dimensional angle measurement method and device based on reflection gratings and belongs to technologies of production of precision instruments and precision test and measurement. According to the high-accuracy three-dimensional angle measurement method, a one-dimensional plane reflection grating is used as a sensitive device, so that high-accuracy three-dimensional angle measurement is achieved; a combination of a one-dimensional plane transmission grating and the one-dimensional plane reflection grating is used, so that a light beam to be measuredis parallel to an optical axis, and the working distance of a measurement system is greatly increased, and meanwhile, a detection structure is more compact; the light beam to be measured is parallelto the optical axis, so principle errors of deflection angle measurement are eliminated; different line pairs of gratings are replaced, so that the requirements on different measurement precisions ofa roll angle can be met.

Description

Technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and precision test and measurement, and mainly relates to a high-precision three-dimensional angle measurement method and device based on a reflection grating. Background technique [0002] Angle is an important part of basic geometric measurement and testing. High-precision angle measurement is used in microelectronics processing and manufacturing, precision instrument processing and assembly, optical surface inspection, mechanical deformation of building structures, precision motion monitoring, processing and assembly of aerospace equipment, and It is widely used in scientific research and other fields. Especially with the continuous development and improvement of various fields, the requirements for the accuracy and stability of angle measurement are also increasing, so the research of high-precision three-dimensional angle measurement methods and devices is particularly i...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26G01C1/00
CPCG01B11/26G01C1/00
Inventor 崔继文任文然谭静谭久彬
Owner 哈尔滨超精密装备工程技术中心有限公司
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