A Soft X-ray Microscopic Imaging Device

Abstract

A soft X-ray micro imaging device, which comprises a soft X-ray light source (300), a three-dimensional displacement mechanism, a vacuum unit (400), a laser unit (500), a reflection unit (600), a sample chamber (700) and a detector (800), wherein the soft X-ray light source (300) comprises a vacuum target chamber, a refrigeration chamber (44) and a nozzle (36), wherein the refrigeration chamber (44) and the nozzle (36) are accommodated in the vacuum target chamber, the nozzle (36) is arranged on the refrigeration chamber (44), the three-dimensional displacement mechanism is respectively connected with the refrigeration chamber (44) and the vacuum target chamber, and the vacuum target chamber is provided with two opposite outlets; the vacuum unit (400) comprises a first vacuum pump (420) and a second vacuum pump (430), which are respectively connected with the two outlets of the vacuum target chamber; the pulse laser emitted by a pulse laser generator (501) is focused at the nozzle (36) after passing through a laser focusing mirror (520); the reflection unit (600) is provided with a second reflector (605); the sample chamber (700) communicates with the vacuum target chamber, a capillary glass tube (713) is accommodated in the sample chamber (700), and the position of the capillary glass tube (713) corresponds to the nozzle (36) and the focal point of the second reflector (605); and the detector (800) is connected with the sample chamber (700) and corresponds to the position of the capillary glass tube (713). Therefore, the soft X-ray micro imaging device has advantages of precise detection, high efficiency and economical cost.

Description

technical field [0001] The present application relates to the field of soft X-rays, and more particularly relates to a soft X-ray microscopic imaging device. Background technique [0002] X-ray is a kind of electromagnetic radiation with very short wavelength. Its wavelength is about 0.01-100 angstroms, which is between ultraviolet rays and gamma rays. It has high penetrating ability and can pass through many substances that are opaque to visible light. X-rays with shorter wavelengths have greater energy and are also called hard X-rays, while X-rays with longer wavelengths have lower energy and are called soft X-rays. Generally, those with wavelengths less than 0.1 angstroms are called superhard X-rays, those with wavelengths in the range of 0.1 to 10 angstroms are called hard X-rays, and those with wavelengths in the range of 10 to 100 angstroms are called soft X-rays. [0003] In recent years, soft X-rays have been widely used in many scientific fields, especially in the ...

AI Technical Summary

Problems solved by technology

[0005] The purpose of this application is to provide a soft X-ray microscopic imaging device, thereby solving the problems of low detection efficiency and high cost of soft X-ray microscopic imaging instruments in the prior art

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