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Three Channel Microwave Power Sensor

A microwave power, three-channel technology, applied in the direction of electric power measurement by thermal method, can solve the problems of low precision and insufficient measurement range

Active Publication Date: 2020-10-27
NANJING UNIV OF POSTS & TELECOMM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Aiming at the problems of insufficient measurement range and low precision in existing thermoelectric microwave power sensors, the present invention proposes a three-channel microwave power sensor

Method used

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Experimental program
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Embodiment Construction

[0022] The technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0023] A three-channel microwave power sensor, including a substrate, a coplanar waveguide transmission line 1, a ground wire 5, a capacitor plate 13, a sensitive element 10, a cantilever beam 2, a load resistor 3 and a thermopile 4, is characterized in that:

[0024] The coplanar waveguide transmission line 1 is arranged on a substrate, and ground wires 5 are provided on both sides thereof, and the ground wire 5 on one side is connected to a ground wire output terminal 6 .

[0025] A load resistor 3 is connected between the end of the coplanar waveguide transmission line 1 and the ground wire 5 on one side, the other side of the load resistor 3 is provided with a thermopile 4, and the two ends of the hot spot stack 4 are respectively connected to the DC Outputs 7 and 8 are connected.

[0026] The sensitive element 10 is embedded in...

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Abstract

The invention proposes a three-channel microwave power sensor, adopts MEMS planar processing technology, and has the advantages of small volume, high integration degree and the like. The three channels include resistive, capacitive and pyroelectric. Using a resistive sensor can greatly increase the power range of the microwave signal to be measured. When the microwave signal is weak, it passes through the pyroelectric sensor, and when the microwave signal is strong, it passes through the capacitor. When the microwave signal is very strong, the resistive sensor can improve the accuracy of the detection signal by measuring the microwave signal in separate channels. In summary, the three-channel microwave power sensor has the advantages of high precision, large measurement range, and high sensitivity.

Description

technical field [0001] The invention belongs to the field of MEMS micromechanical sensors, and in particular relates to a three-channel microwave power sensor. Background technique [0002] The development of microwave technology based on microelectromechanical systems (MEMS) has become an important symbol of the development of a country's scientific and technological level. In the research of microwave signal generation, transmission and reception, etc., the measurement of microwave power is an indispensable basic testing technology. At present, the most commonly used microwave power detection tool is the pyroelectric microwave power sensor based on the pyroelectric effect. However, the traditional thermoelectric MEMS microwave power sensor has the disadvantages of small microwave signal amplitude and insufficient precision. In recent years, with the continuous development of sensitive components, three-channel microwave power sensors have become possible. Contents of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R21/02
Inventor 李龙飞胡加杨王德波
Owner NANJING UNIV OF POSTS & TELECOMM