Multi-degree-of-freedom compliant micromanipulator based on bionic flapping wings

Abstract

The invention discloses a multi-degree-of-freedom compliant micromanipulator based on bionic flapping wings, and relates to a piezoelectric stacked compliant micromanipulator. The multi-degree-of-freedom compliant micromanipulator comprises an operation platform, a non-planar base, a connecting seat and three single-degree-of-freedom displacement mechanisms. The three single-degree-of-freedom displacement mechanisms are installed on the non-planar base, and the operation platform is supported by the three single-degree-of-freedom displacement mechanisms. Each single-degree-of-freedom displacement mechanism comprises an internal displacement transmission mechanism and a machine frame with a flexible hinge. Each internal displacement transmission mechanism comprises a rigid frame, a pushingblock, a piezoelectric stacked driver I, a piezoelectric stacked driver II and amplification decoupling mechanisms arranged in pairs. The machine frames are connected with the operation platform, andthe rigid frames are connected with the non-planar base. The multi-degree-of-freedom compliant micromanipulator has the advantages of no displacement coupling and multi-degree-of-freedom motion, and is applied to micro-operation robot systems and micro-electromechanical systems.

Description

technical field [0001] The invention relates to a micro- and nanoscale piezoelectric stack compliant micro-manipulator, in particular to a multi-degree-of-freedom compliant micro-manipulator based on bionic flapping wings. Background technique [0002] With the rapid development of nanotechnology, the application in the fields of precision machining and precision measurement, microelectronics engineering, bioengineering, nanoscience and technology has become more and more extensive, and the society has higher and higher requirements for micro-nano manipulators. In addition to its micro-nano positioning accuracy and large motion stroke, it is required to have excellent stability, certain stiffness and fast enough response speed. [0003] The compliant mechanism is a new type of assembly-free mechanism that uses flexible hinges instead of traditional mechanism kinematic joints, and uses elastic deformation of compliant components to transmit or convert motion and force. As a ...

AI Technical Summary

Problems solved by technology

But for more complex operations, the precision positioning platform not only needs to move in the x and y directions, but also needs to move in the z direction. In addition, the problem of small operating strokes is becoming more and more prominent in the actual use process

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