Parylene color film coating process and film coating device

A coating device, the technology of Parylene, applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problems that the coating material is difficult to detect, and the product cannot be directly observed with the naked eye, so as to solve the problems that are difficult to detect, Low cost, strong practical effect

Pending Publication Date: 2019-06-14
JIANGSU KERUN PHOTOELECTRIC TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The main purpose of the present invention is to provide a kind of parylene color coating process and a coating device in order to solve the problem that the processed product cannot be directly observed with the naked eye and the coating material is difficult to detect after parylene coating

Method used

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  • Parylene color film coating process and film coating device
  • Parylene color film coating process and film coating device
  • Parylene color film coating process and film coating device

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Embodiment Construction

[0039] In order to make the technical solutions of the present invention clearer and clearer to those skilled in the art, the present invention will be further described in detail below in conjunction with the examples and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0040] The parylene color coating process provided by the present embodiment comprises the following steps:

[0041] Step 1: Put the colored dye powder into the sublimation cup, seal the sealing ring, fix the heating ring on the sublimation cup, connect the sublimation cup with the vacuum deposition chamber through the connecting ring, and fix it, and connect the vacuum deposition chamber and the heating ring connected to the heating controller;

[0042] Step 2: sealing the vacuum deposition chamber and pumping it to a vacuum through a vacuum system;

[0043] Step 3: using a cooling controller to control the temperature of the vacuum deposition chamber area betwee...

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Abstract

The invention discloses a parylene color film coating process and a film coating device, and belongs to the technical field of chemical vapor deposition. An out-of-bin dye evaporation system and an in-bin dye evaporation system are adopted in the parylene color film coating process, and the parylene color film coating process solves the problem that a film coating material processed in the prior art is not easy to detect; meanwhile, film formation characteristics are obvious, color varieties are diversified, and color dye powder is sublimated and uniformly deposited on a processing piece, therefore, the detection can be clearly and visually carried out; and the process is simple, practical, low in cost and high in practicability. The process has obvious color effects on various processed products, and meanwhile, the protection effect of parylene is achieved.

Description

technical field [0001] The invention relates to a coating process and a coating device, in particular to a parylene color coating process and a coating device, belonging to the technical field of chemical vapor deposition. Background technique [0002] Chemical vapor deposition is a traditional technique for preparing thin films, which is widely used in the deposition of various materials in the semiconductor industry, including a wide range of insulating materials, most metal materials and metal alloy materials. The principle is to use gaseous precursor reactants, Through the chemical reaction between atoms and molecules, some components in the gaseous precursor are decomposed or react with each other, and the film is deposited on the substrate to form a film. [0003] The existing parylene coating process is that after the parylene material is heated and vaporized in the evaporation chamber, it moves to the coating chamber through the cracking chamber under the action of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/448
Inventor 张卫兴张振兴庄丽叶张荠文
Owner JIANGSU KERUN PHOTOELECTRIC TECH CO LTD
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