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A kind of magnetic nano particle composite film and preparation method thereof

A technology of magnetic particles and composite films, applied in the directions of magnetic films, magnetic layers, magnetic objects, etc., can solve the problems of combined growth and size control of nano-particle composite films, uneven particle size and distribution, etc., and achieve controllable film growth. The effect of good performance, improved saturation magnetization and simple equipment

Active Publication Date: 2021-05-25
NORTHEASTERN UNIV LIAONING +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the combined growth and size of nanoparticle composite films are difficult to control, and the particle size and distribution are not uniform, which limits the further improvement of the magnetic properties of nanoparticle composite films.

Method used

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  • A kind of magnetic nano particle composite film and preparation method thereof
  • A kind of magnetic nano particle composite film and preparation method thereof
  • A kind of magnetic nano particle composite film and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0037] Fe 20 Ni 80 The evaporation rate at 1375°C is 0.916nm / min, and the evaporation rate of SiO at 982°C is 0.238nm / min. Fe 20 Ni 80 - The SiO layer is deposited at the above rate for 6min33s, and the insulating layer SiO is deposited at the above rate for 4min12s, alternately deposited 5 times. The preparation method of magnetic nano particle composite film comprises the following steps:

[0038] Step 1, substrate selection and pretreatment:

[0039] Select a polished silicon wafer with a surface roughness of less than 0.5nm and a crystal orientation of (100), ultrasonically clean the silicon wafer in acetone, deionized water, and alcohol solution for 15 minutes, and dry it with a high-purity argon high-pressure spray gun;

[0040] Step 2, raw material preparation:

[0041] The raw material used is Fe with a diameter of 1mm 20 Ni 80Granules and SiO particles with a diameter of 3mm, the purity of the raw materials is 99.999%. Put the two raw materials into two custom...

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Abstract

The invention discloses a composite film of magnetic nanoparticles and a preparation method thereof, belonging to the technical field of magnetic control of thin film materials. A magnetic nanoparticle composite film, the composite film is formed by continuous and alternate deposition of a magnetic layer and an insulating layer, and the thickness of the composite film is 15 to 100 nm; the magnetic layer is a film formed by uniformly embedding magnetic particles in an insulating medium, The composition of the magnetic particles is Fe or Fe-Ni, the volume fraction of the magnetic particles is 80-95%, the thickness of the magnetic layer is 1-20nm; the insulating layer is composed of insulating medium, and the thickness is 0.1-10nm. The magnetic nano particle composite film prepared by the invention can control the merged growth, particle size and distribution uniformity of the nano particles, so as to improve the magnetic properties while refining the crystal grains. The composite film prepared by using the invention is especially suitable for electronic components in the field of digital electronic industry and communication technology.

Description

technical field [0001] The invention belongs to the technical field of magnetic control of thin film materials, and in particular relates to a magnetic nanoparticle composite film and a preparation method thereof. Background technique [0002] The development of digital electronics industry and communication technology requires the development of electronic components in the direction of high integration, high frequency and nanometerization. The magnetic thin film as the core material will produce special electromagnetic phenomena such as giant conductance effect, giant magnetoresistance effect, giant Hall effect and so on after nanometerization. This makes magnetic nano-films widely used in high-density storage, magnetoresistance sensors, high-frequency sensors, micro-electromechanical systems, micro-transformers, anti-electromagnetic interference, and microwave absorption. [0003] Nanoization refers to controlling the grain size within the range of 1-100nm. Sometimes th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F10/00H01F10/14H01F41/32
Inventor 李国建常玲刘诗莹刘晓明王强
Owner NORTHEASTERN UNIV LIAONING
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