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Micro-nano movement system posture control device adopting optical balancing method

A technology of attitude control device and motion system, applied in the direction of using feedback control, etc., can solve problems affecting the accuracy of measurement results, achieve high execution efficiency and control accuracy, improve integration and portability, and improve accuracy

Active Publication Date: 2019-06-28
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, due to the existence of manufacturing errors in the structure of the micro-displacement motion system in actual use, its motion posture will change during the execution of the motion system, which will eventually affect the accuracy of the measurement results. It is of great significance to improve the measurement accuracy

Method used

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  • Micro-nano movement system posture control device adopting optical balancing method
  • Micro-nano movement system posture control device adopting optical balancing method

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Embodiment 1

[0023] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0024] Example 1

[0025] Such as figure 1 , 2 As shown, the posture control device of the micro-nano motion system disclosed by the optical balance method in this embodiment is composed of a control system module 1 , an optical measurement module 2 , a photoelectric demodulation module 3 , and an actuator module 4 . The control system module 1 adopts an embedded system, and realizes measurement data and task execution through parallel bus control, and coordinates the actuator to complete attitude control during the process; the optical measurement module 2 is used for parameter measurement of spatial shape and position, and the measurement light source adopts 680nm laser. The conversion of measurement information is realized through optical energy and local interference modulation information; the photoelectric demodulation module 3 is used for the m...

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Abstract

The invention discloses a micro-nano movement system posture control device adopting an optical balancing method and belongs to the technical field of precision measurement of geometric quantities. The device mainly comprises a control system module, an optical measurement module, a photoelectric demodulation module and an execution mechanism module. Accurate information of a position is determined with light energy and local interference modulated frequency information, wherein the position information is used for posture control in the movement of a micro-nano movement system. Light energy in a measurement signal is used for guaranteeing determination of an effective area of the measured signal, the interference modulated frequency information is used for judging the position of a balance point in the measurement area, and finally, operation and driving of the execution mechanism are performed in the control system module to guarantee that the movement posture of the micro-nano movement system is stable and controllable. The problems that posture measurement sensitivity of common movement systems is low, measurement drifting exists and the like can be solved, the device is relatively simple in structure, integration and portable performance of the movement system are favorably improved, the device is high in measurement efficiency and good in resolving power, and the instantaneity and the accuracy of posture control are favorably improved.

Description

technical field [0001] The invention relates to an attitude control device for a micro-nano motion system using an optical balance method, and belongs to the technical field of precise measurement of geometric quantities. Background technique [0002] The micro-nano displacement motion system plays an important role in geometric quantity measurement and is widely used in geometric quantity measurement, precision manufacturing and other fields. Usually, in specific applications, structural forms such as flexible structures and precision guide rails are used, and high-accuracy displacement and attitude measurement values ​​are used as feedback to jointly achieve precise position generation and control. However, due to the existence of manufacturing errors in the structure of the micro-displacement motion system in actual use, its motion posture will change during the execution of the motion system, which will eventually affect the accuracy of the measurement results. It is of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D3/12
Inventor 朱振宇段小艳李华丰
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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