Silicon-based micro gas chromatography column and preparation method thereof

A micro-gas chromatography, silicon-based technology, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problem of low surface area of ​​micro-gas chromatography column, achieve the effect of increasing column capacity and increasing surface area

Pending Publication Date: 2019-07-02
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above-mentioned shortcoming of the prior art, the object of the present invention is to provide a kind of silicon-based micro gas chro...

Method used

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  • Silicon-based micro gas chromatography column and preparation method thereof
  • Silicon-based micro gas chromatography column and preparation method thereof
  • Silicon-based micro gas chromatography column and preparation method thereof

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Embodiment 1

[0050] Such as Figure 1 ~ Figure 4 As shown, the present embodiment provides a kind of preparation method of silicon-based micro gas chromatography column, and described preparation method comprises steps:

[0051] Such as Figure 1 ~ Figure 2 As shown, step 1) is first carried out, a silicon substrate 2 is provided, a silicon nitride film 21 is grown on the silicon substrate 2, and photoresist 22 is spin-coated, and silicon nitride is formed by photolithography-etching process and the mask pattern of photoresist 22, then adopt DRIE process to make microchannel 1 in described silicon substrate 2, then remove described photoresist 22, and described microchannel 1 can be curved back and forth extension, so The microchannel 1 includes a bottom 13 and sidewalls 12 .

[0052] As an example, the microchannel 1 also has one or both of a plurality of channel units and a plurality of micropillar 11 arrays.

[0053]As an example, step 1) further includes the step of fabricating micro...

Embodiment 2

[0078] Such as Figure 1 ~ Figure 3 and Figure 5 ~ Figure 6 As shown, this embodiment provides a method for preparing a silicon-based micro-gas chromatographic column, the basic steps of which are as in Example 1, wherein the difference from Example 1 is that the package cover includes a silicon cover 5, A silicon nanowire forest 4 is prepared on the silicon cover plate 5 in a region corresponding to the microchannel 1 , and the silicon cover plate 5 is bonded to the silicon substrate 2 through a silicon-silicon bonding process. For example, a patterned silicon nitride mask layer is formed on the surface of the silicon cover plate 5, and then prepared on the surface of the silicon cover plate 5 corresponding to the microchannel 1 by the method in step 2). The silicon nanowire forest 4 is finally bonded to the silicon cover plate 5 and the silicon substrate 2 through a silicon-silicon bonding process.

[0079] Such as Figure 6 As shown, this embodiment also provides a sili...

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Abstract

The invention provides a silicon-based micro gas chromatography column and a preparation method thereof. A layer of fine silicon nanowire forest is designed and prepared on the inner surface of a microchannel of the silicon micro chromatography column, and the nanowire diameter is generally distributed between several nanometers to tens of nanometers. The fine silicon nanowire forest greatly increases the surface area of the silicon micro chromatography column, and the column capacity, the resolution and the column efficiency of the silicon micro chromatography column are thus effectively improved.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical systems, in particular to a silicon-based micro gas chromatography column and a preparation method thereof. Background technique [0002] The main function of the gas chromatographic column is to separate the mixed sample gas to be analyzed, which is the core component of the gas chromatograph. Traditional gas chromatography columns include capillary columns, packed columns, etc. Due to their large volume, special column thermostats are needed to heat them, and their power consumption can reach several kilowatts. Therefore, in order to realize the miniaturization of gas chromatographs, the micro Transformation is crucial. [0003] Since the late 1970s, people began to try to fabricate micro-column chips on silicon substrates by etching / etching. In order to improve the separation efficiency of silicon-based micro-chromatographic columns, researchers have optimized their geometric structure ...

Claims

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Application Information

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IPC IPC(8): G01N30/60
CPCG01N30/60
Inventor 冯飞罗凡李昕欣
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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