A multi-cavity bidirectional piezoelectric pump excited by a piezoelectric transducer and its pumping method

Abstract

The invention discloses a multi-cavity bidirectional piezoelectric pump excited by a piezoelectric transducer and a pumping method thereof, and belongs to the field of fluid machinery. The multi-cavity bidirectional piezoelectric pump is characterized in that valve cavity cover plates, a pump cavity cover plate and a pump body are sequentially connected, two valve cavity elastic thin films are arranged at the bottoms of through holes of the two valve cavity cover plates, the tail ends of two valve cavity bending transducers are rigidly connected with the centers of the surfaces of the two valve cavity elastic thin films, a pump cavity elastic thin film is arranged at the bottom of a through hole of the pump cavity cover plate, the head end of a pump cavity bending vibration transducer is fixed in the pump cavity cover plate through a bending vibration transducer connecting piece, the tail end of the pump cavity bending vibration transducer is rigidly connected with the lower surface ofthe pump cavity elastic thin film, two valve cavity annular sealing rings are tightly pressed on the pump body through the valve cavity cover plates and the two valve cavity elastic thin films, and apump cavity annular sealing ring is tightly pressed and fixed under the pump body through the pump cavity cover plate and the pump cavity elastic thin film. According to the multi-cavity bidirectional piezoelectric pump excited by the piezoelectric transducer and the pumping method thereof, an adopted piezoelectric transducer vibrator has the advantages of being large in output force, high in response speed, free of electromagnetic interference and the like, and can realize the micro-liquid transfer of large pressure and flow.

Description

technical field [0001] The invention belongs to the field of fluid machinery, in particular to a multi-cavity bidirectional piezoelectric pump excited by a piezoelectric transducer and a pumping method thereof. Background technique [0002] The piezoelectric pump is a new type of fluid driver, which uses the inverse piezoelectric effect to deform the piezoelectric vibrator, so that the volume of the pump chamber changes and the pressure difference occurs, thereby realizing the fluid output. The traditional hydraulic pump is composed of a driving source, a pump body and blades that directly act on the liquid, while a piezoelectric pump can integrate the driving source, transmission part and pump body of a traditional hydraulic pump. Compared with traditional hydraulic pumps, piezoelectric pumps have many advantages such as small volume and weight, simple structure, fast response, no electromagnetic interference, low energy consumption, and small flow control. It has broad ap...

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Problems solved by technology

[0004] In order to solve the technical problem that the output pressure and flow rate of the existing active valve control piezoelectric micropump using piezoelectric film vibrators are relatively small, the present invention discloses a multi-cavity bidirectional piezoelectric pump excited by piezoelectric transducers. Pumps and their pumping methods

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