Piezoelectric-electromagnetic hybrid driving multi-degree-of-freedom precision positioning device and control method
An electromagnetic hybrid and precise positioning technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., to achieve functional integration, clamp stability, improvement optimization and maintenance Effect
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[0035] The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.
[0036] see Figure 1 to Figure 8 As shown, the piezoelectric-electromagnetic hybrid drive type multi-degree-of-freedom precision positioning device of the present invention has the advantages of compact structure, stable clamping, integrated functions, high repeat positioning accuracy, etc., and can be used as a bearing requirement in the gravity direction, and positioning The precision positioning mechanism with high precision requirements is more practical. The invention utilizes the magnetic steel mobile electromagnetic drive unit to realize the linear positioning of the axial large stroke; utilizes the piezoelectric inertia type rotary positioning component and the piezoelectric double chip type rotary positioning component to realize the macro-micro hybrid rotary positioning; and utilizes the clamping mechani...
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