Liquid floating spray tray for COF wet process

Abstract

The invention relates to a liquid floating spray tray for a COF wet process. The liquid floating spray tray comprises a sealed cavity, the side wall of the sealed cavity is provided with a water inletand a water outlet hole, and a developing solution enters the sealed cavity through the water inlet and is flushed out in a liquid column node through the water outlet hole to jack a COF product located at the upper portion of the water outlet hole and perform developing effect on the COF product. In the structure mentioned above, the liquid column formed by the developing liquid is configured todirectly support the COF product with no need for other structures to be in contact with the COF product for support so as to avoid usage of a traditional segment gap roller and so as not to need theside design for the segment gap roller, and the structure is simple; and moreover, it is avoided that the structure having a support effect is in contact with the COF product to pollute or damage a dry film or a circuit of the COF product so as to improve the COF product quality.

Description

technical field [0001] The invention relates to the technical field of COF (chip on film) processing, in particular to a liquid floating roller and a liquid floating method used in the COF wet process. Background technique [0002] COF is an emerging packaging technology that uses a flexible additional circuit board as a packaged chip carrier to bond the chip to the flexible substrate circuit, or simply refers to the flexible additional circuit board of an unpackaged chip. [0003] The development process is very important in the wet process of COF products. It is to remove the unexposed part of the dry film on the product and leave the exposed part; the existing equipment for realizing this process is a step roller, that is, on the circumferential side of the roller There are grooves on the wall, and the parts without grooves naturally form protrusions; and it is necessary to design the grooves and protrusions suitable for the size of the COF product, so that the waste area...

AI Technical Summary

Problems solved by technology

[0004] However, because the dry film of COF products is very thin and the lines are dense and slender, once it comes into contact with other objects, it is easy to cause scratches on the dry film or damage to the lines. Contact with the processing area of ​​the COF product itself during the process, or the developer crystallizes in the groove and contacts the processing area of ​​the COF product itself, causing scratches on the dry film, foreign matter pollution or line damage, affecting the quality of the COF product and even the production pass rate

[0005] Therefore, it is necessary to design a new equipment and method that can realize the development process in the wet process of COF products, so as to avoid the adverse effects of traditional step rollers on the dry film or lines of COF products

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