Compensation method of error of contact biological cell imaging scanning through atomic power probe
A biological cell and imaging error technology, applied in the field of microscopic imaging and cell topography imaging, can solve the problems of cell topography map error, cell scanning image topography error, large cell height drop, etc., to achieve high detection accuracy, high The degree of fusion, the effect of improving the fusion effect
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[0051] Before compensating for cell topography imaging, the AFM probe was first calibrated in a plane. Utilize scanning probe 11 for such Figure 4 A planar calibration substrate engraved with a cross-shaped pattern is scanned and imaged as shown, Figure 4 The calibration substrate in is to use a focused ion beam to etch a cross pattern in the central area of a square silicon wafer with a side length of 20mm. composition.
[0052] according to figure 1 As shown, sequentially for 0°(I), 45°(II), 90°(III), 135°(IV), 180°(V), 225°(VI), 270°(VII), 315°( VIII) Scan imaging in eight directions. Read the center coordinates of the cross pattern in eight scanned images respectively: 0 ° (I) direction is (x1, y1); 45 ° (II) direction is (x2, y2); 90 ° (III) direction is ( x3, y3); 135° (IV) direction is (x4, y4); 180° (V) direction is (x5, y5); 225° (VI) direction is (x6, y6); 270° (VII) direction is (x7, y8); the 315° (VIII) direction is (x8, y8).
[0053] The horizontal cali...
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