A Compensation Method for Imaging Errors of AFM Contact Scanning Biological Cells
A technology of biological cells and imaging errors, which is applied in the field of microscopic imaging and cell morphology imaging, can solve the problems of cell scanning image morphology errors, cell morphology map errors, and large cell height differences, so as to improve the fusion effect and high The effect of fusion degree and high detection accuracy
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[0051] Before compensating for cell topography imaging, the AFM probe was first calibrated in a plane. Utilize scanning probe 11 for such Figure 4 A planar calibration substrate engraved with a cross-shaped pattern is scanned and imaged as shown, Figure 4 The calibration substrate in is to use a focused ion beam to etch a cross pattern in the central area of a square silicon wafer with a side length of 20mm. composition.
[0052] according to figure 1 As shown, sequentially for 0°(I), 45°(II), 90°(III), 135°(IV), 180°(V), 225°(VI), 270°(VII), 315°( VIII) Scan imaging in eight directions. Read the center coordinates of the cross pattern in eight scanned images respectively: 0 ° (I) direction is (x1, y1); 45 ° (II) direction is (x2, y2); 90 ° (III) direction is ( x3, y3); 135° (IV) direction is (x4, y4); 180° (V) direction is (x5, y5); 225° (VI) direction is (x6, y6); 270° (VII) direction is (x7, y8); the 315° (VIII) direction is (x8, y8).
[0053] The horizontal cali...
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