Laser interferometric calibration measurement equipment and method for measuring the absolute surface shape of flat crystals

Abstract

The invention provides a laser interferometric calibration and measurement device and method for measuring an optical flat absolute plane shape. A vertical-type laser interferometric measurement device comprises a device main body, a reference optical flat carrying device, an optical flat rotating and carrying device and an optical flat bearing device, wherein the device main body is provided witha collimating lens; the optical flat rotating and carrying device is coaxially arranged with the reference optical flat carrying device and used as a to-be-measured optical flat carrying device in ahorizontal-type measurement state; the optical flat bearing device replaces the optical flat rotating and carrying device, and is used as a to-be-measured optical flat carrying device in a vertical-type measurement state; and the optical flat rotating and carrying device is provided with a fixed disc, a rotating and carrying part and a limiting part, the limiting part is used for limiting a rotating disc in a first position when the rotating disc is switched to the first position and limiting the rotating disc in a second position when the rotating disc is switched to the second position, theoptical flat bearing device is provided with a mounting seat and a bearing part, the bearing part is arranged on the mounting seat, and comprises a bearing component, and the bearing component is provided with a soft bearing plane.

Description

technical field [0001] The invention belongs to the technical field of laser interference measurement equipment, and in particular relates to a laser interference calibration measurement equipment and a measurement method for measuring the absolute surface shape of a flat crystal. Background technique [0002] Laser interferometry equipment, also known as laser interferometer, is a device that uses optical interference technology to measure the topography information of optical parts such as flat crystals. [0003] The three-plane mutual inspection method is the most commonly used measurement method to measure the absolute surface shape information of flat crystals. However, when using the three-plane mutual inspection method to measure the absolute shape of the working surface of the flat crystal, the measured flat crystal needs to be rotated at a certain angle to measure relative to the reference mirror. The deviation of the rotation angle and the deviation of the rotation...

AI Technical Summary

Problems solved by technology

However, there are not only a wide variety of flat crystals to be tested, but also a large number. If all of them are supported by edge rings and the finite element analysis method is used to obtain the self-weight deformation of the flat crystals to be tested, it is difficult to meet the requirements of large quantities of multiple types of flat crystals to be tested. Demand for rapid measurement of flat crystal morphology

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