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Panel for flexible digital x-ray detector and manufacturing method thereof

An X-ray and detector technology, applied in the field of panels used for flexible digital X-ray detectors and its manufacturing field, can solve the problems that it is difficult to be used as a flexible digital X-ray detector, and the flexible digital X-ray detector has not been satisfied. , to achieve the effect of eliminating the need

Active Publication Date: 2019-07-19
LG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] Conventional digital X-ray detectors use a rigid glass substrate as a supporting substrate, making it difficult to use conventional digital X-ray detectors as flexible digital X-ray detectors
Recently, the user's expectation of using flexible digital X-ray detectors has not been met

Method used

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  • Panel for flexible digital x-ray detector and manufacturing method thereof
  • Panel for flexible digital x-ray detector and manufacturing method thereof
  • Panel for flexible digital x-ray detector and manufacturing method thereof

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Embodiment Construction

[0029] The above objects, features and advantages will become apparent from the detailed description with reference to the accompanying drawings. The embodiments are described in sufficient detail to enable those skilled in the art to easily practice the technical idea of ​​the present disclosure. Detailed descriptions of well-known functions or configurations may be omitted so as not to unnecessarily obscure the gist of the present disclosure. Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Like reference numerals refer to like elements throughout the drawings.

[0030] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings.

[0031] In the following description, it is assumed that a certain object is formed on (above) or below (below) the corresponding constituent elements, which means that two constituent elements are brought into direct co...

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Abstract

A panel for a flexible digital X-ray detector and a method for manufacturing the same are disclosed. The flexible digital X-ray detector reduce device characteristic deterioration caused by X-ray exposure, increase flexibility to the panel by reducing a thickness of the panel yet provide rigidity to maintain the shape of the panel, and reduce residual impurities during a Laser Lift Off (LLO) process. The panel can include a multi-buffer layer in which a silicon oxide (SiOx) layer and a silicon nitride (SiNx) layer are alternately stacked, and a device array layer and a scintillator layer thatare disposed over the multi-buffer layer. During the LLO process, the method for manufacturing the panel includes increasing the hydrogen content using a sacrificial layer including an amorphous silicon (a-Si) layer and a silicon nitride (SiNx) layer disposed at both surfaces of the a-Si layer, such that the amount of residual impurities in the sacrificial layer can be reduced.

Description

technical field [0001] The present disclosure relates to panels for flexible digital X-ray detectors and methods of manufacturing the same. Background technique [0002] A digital X-ray detector (DXD) refers to a device capable of detecting the amount of transmission (eg transmittance) of X-rays passing through an object and displaying an internal image of the object on a display. With the rapid development of digital technology, thin-film transistor (TFT)-based digital X-ray detectors have recently been developed and are rapidly entering medical use. [0003] figure 1 is a sectional view showing a conventional digital X-ray detector. refer to figure 1 , the base substrate 10 serving as the support substrate of the digital X-ray detector 1 is first provided. In this case, the base substrate 10 is generally formed of a glass substrate. [0004] A thin film transistor layer 20 and a PIN diode layer 30 connected to the thin film transistor layer 20 may be disposed over the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146G01N23/04G01T1/20
CPCH01L27/14663H01L27/14683G01N23/04G01N2223/03G01N2223/1016G01N2223/505G01T1/20183G01T1/20189H01L27/14692H01L31/115H01L31/1892G01T1/1614G01T1/026G01T1/1612H01L31/0376G01T1/202H01L31/03926H01L27/14689
Inventor 金镇必尹敏奭
Owner LG DISPLAY CO LTD
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