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Acoustic resonator including annular convex beam eave structure, filter and electronic device

A ring-shaped protrusion and resonator technology, applied in the field of communication, can solve the problems of limited improvement space and difficult to improve the quality factor of the resonator.

Pending Publication Date: 2019-07-26
TIANJIN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, when the material of the resonator and the stacked structure are determined, the improvement space of Qs (or Rs) is limited, and the quality factor of the resonator is difficult to improve

Method used

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  • Acoustic resonator including annular convex beam eave structure, filter and electronic device
  • Acoustic resonator including annular convex beam eave structure, filter and electronic device
  • Acoustic resonator including annular convex beam eave structure, filter and electronic device

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Embodiment Construction

[0034] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, those skilled in the art can understand that in each embodiment of the present invention, many technical details are provided for readers to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in this application can also be realized.

[0035] A first embodiment of the invention relates to an acoustic resonator comprising an annular raised cornice structure. like figure 1 and figure 2 As shown, the acoustic resonator includes a top electrode 101 , a piezoelectric layer 102 , a bottom electrode 103 , an acoustic reflection structure 104 and a substrate 105 which are sequentially connec...

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Abstract

The invention relates to the field of communication, and provides an acoustic resonator comprising an annular convex beam eave structure, a filter and an electronic device, and the resonator comprisesa top electrode, a piezoelectric layer, a bottom electrode, an acoustic reflection structure and a substrate which are sequentially connected in position relation. The edge of the top electrode is provided with an eave structure, the eave structure is located in the effective area of the acoustic resonator, and an air gap is formed between the eave structure and the piezoelectric layer. The edgeof the top electrode is further provided with a beam structure, one part of the beam structure is located in the effective area of the acoustic resonator, and an air gap is formed between the beam structure and the piezoelectric layer. A first protruding structure is arranged at the position corresponding to the eave structure, and a second protruding structure is arranged at the position corresponding to the beam structure. Compared with the prior art, the quality factor or the parallel impedance of the acoustic resonator can be effectively improved.

Description

technical field [0001] The invention relates to the communication field, in particular to an acoustic resonator comprising an annular raised beam eaves structure. Background technique [0002] Because the bulk acoustic wave filter has the advantages of low insertion loss, high square coefficient, high power capacity, etc., the bulk acoustic wave filter is widely used in contemporary wireless communication systems, and the bulk acoustic wave filter determines the quality of the radio frequency signal entering and leaving the communication system important components. Bulk acoustic wave resonators are cascaded to form a bulk acoustic wave filter, and each stage of bulk acoustic wave filter includes series resonators and parallel resonators. The performance of a bulk acoustic wave filter is determined by the bulk acoustic wave resonators that make it up. For example, the resonant frequency of the bulk acoustic wave resonator determines the operating frequency of the filter, t...

Claims

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Application Information

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IPC IPC(8): H03H9/00H03H9/02H04B1/40
CPCH03H9/0014H03H9/02007H03H9/02039H04B1/40
Inventor 杨清瑞庞慰张孟伦
Owner TIANJIN UNIV
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