Mask plate, evaporation plating device and method, and design method of evaporation plating opening of mask plate

Abstract

The invention provides a mask plate, an evaporation plating device and method, and a design method of an evaporation plating opening of the mask plate and relates to the technical field of display. The alignment accuracy between a substrate to be subjected to evaporation plating and the mask plate can be improved in the evaporation plating process. The mask plate is provided with a plurality of evaporation plating openings and at least one first detection opening. The size of the first detection opening is less than that of each evaporation plating opening. The first detection opening is arranged close to the at least one evaporation plating opening.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask, an evaporation device, an evaporation method, and a method for designing an evaporation opening in the mask. Background technique [0002] During the manufacturing process of the display panel, it is sometimes necessary to use an open mask to form certain film layers. Taking the display panel as an example of an Organic Light Emitting Diode (OLED) display panel, a mask plate can be used to vapor-deposit other functional film layers in the light-emitting functional layer except the light-emitting layer. Of course, for some types of OLED display panels, the light emitting layer can also be formed through a mask. [0003] Such as figure 1 As shown, the substrate to be evaporated 3 is located on the upper side of the mask 1 , and the evaporation source 4 is located on the lower side of the mask 1 . Since in the evaporation process, the evaporation opening on the mask plat...

AI Technical Summary

Problems solved by technology

[0004] At present, the alignment between the mask plate 1 and the substrate to be evaporated 3 is mainly determined by the alignment holes provided on the mask plate 1 and the alignment mark on the substrate to be evaporated 3, and the alignment structure is single

Therefore, the accuracy of the alignment between the evaporation opening and the evaporation area cannot be effectively guaranteed, and the evaporation position of the film layer cannot be guaranteed if the alignment is not accurate.

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