Continuous phase plate design method for full-frequency segmental control of focal spot
A segmented control, phase plate technology, applied in instruments, polarizing elements, optics, etc., can solve problems such as low computational efficiency, sensitivity to initial conditions and parameters, and achieve the effects of ensuring convergence, improving design efficiency, and improving uniformity
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[0036] Below in conjunction with example the present invention is further described.
[0037] The continuous phase plate design method of focal spot full-frequency subsection control, the process is as follows figure 1 As shown, the specific steps are as follows:
[0038] [A] Determine the wavelength of the laser λ = 351nm; near-field input distribution E in It is a 12th-order super-Gaussian square beam, and its aperture at 1% light intensity is 310mm; determine the focal length f=2234mm; the far-field target distribution E obj It is a 5th-order super-Gaussian circular beam with an aperture of 600 μm at 1% light intensity;
[0039] [B] Determine the side length of the square phase plate L=335mm;
[0040] [C] Set the threshold σ to be reached by the root mean square error of the light intensity at the top of the focal spot RMS =0.35;
[0041] [D] According to the process cycle limitation, design a low-pass Gaussian filter that limits the phase period, and the function expr...
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