A kind of rotating structure and preparation method thereof

Abstract

The embodiment of the invention discloses a rotating structure and a preparation method thereof, the preparation method of the rotating structure comprises the following steps: preparing a mask plate by adopting a wet etching process, wherein the mask plate comprises a first slope groove positioned on the first surface of the mask plate and a second slope groove positioned on the second surface of the mask plate; the slope surface of the first slope groove and the slope surface of the second slope groove are (111) crystal surfaces; preparing a slope unit by using the mask plate, wherein the slope unit comprises a first slope surface and a second slope surface which are independently arranged; preparing first electrodes on the first slope surface and the second slope surface respectively; preparing a rotatable unit on one side of the slope unit; and preparing a second electrode, wherein the second electrode is electrically connected with a rotatable unit, and the rotatable unit is used for rotating according to electrostatic force between the first electrode and the second electrode. The slope unit is prepared through the mask plate, the slope unit is easy to prepare, the inclination angle of the slope unit can be very small, and the preparation flexibility of the slope unit is improved.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of micro-electro-mechanical systems, and in particular to a rotating structure and a manufacturing method thereof. Background technique [0002] In the field of microelectromechanical systems, rotating structures can be applied to wavefront correction of adaptive optics, spatial light modulation, alignment of optical elements, micromanipulators, optical switches, optical attenuators, and optical multiplexers. [0003] According to the different driving methods of the rotating structure, it is mainly divided into: electromagnetic drive, electrothermal drive, piezoelectric drive and electrostatic drive. Electromagnetic driving uses the magnetic force generated by electromagnets or permanent magnets as the driving force. The driving current of this driving method is large, the energy consumption is large, and the manufacture of magnetic films and the application of external magnetic fields...

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Problems solved by technology

[0005] Based on this, it is difficult to obtain an electrostatically driven rotating structure with stable performance and no need for high driving voltage in the prior art.

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