High-sensitivity uniaxial MEMS (micro-electro-mechanical-system) gyroscope

A gyroscope and mass block technology, applied in the field of MEMS, can solve the problems of high process etching accuracy, increased sensitivity asymmetry, low mass utilization efficiency, etc., to reduce process deviation, high mass utilization rate, drive Efficiency improvement effect

Active Publication Date: 2019-10-11
SENODIA TECH (SHANGHAI) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The rotational movement mode of the proof mass has great requirements on the sensitive linearity of the sensor, and has high requirements on the process etching precision of the rotating shaft. When there is a small process deviation of the rotating shaft, the asymmetry of the sensitivity will be greatly increased. The mass utilization efficiency is low where the mass block is close to the rotating shaft, and it is not conducive to the reduction of inertial mass and corresponding area

Method used

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  • High-sensitivity uniaxial MEMS (micro-electro-mechanical-system) gyroscope

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Embodiment Construction

[0033] In describing the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top ", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. The attached drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and width of each part, as well as the proportional relationship between each part, etc., are not completely consistent with their actual values.

[0034] Fig...

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Abstract

The invention provides a high-sensitivity uniaxial MEMS (micro-electro-mechanical-system) gyroscope. The high-sensitivity uniaxial MEMS gyroscope comprises driving mass blocks, driving components andCoriolis force mass blocks, and a first direction, a second direction and a third direction which perpendicular to one another are limited; the driving mass blocks are arranged to move in the first direction; the driving components are connected with the driving mass blocks and the Coriolis force mass blocks through elastic structures respectively; the driving mass blocks drive the driving components to move when moving in the first direction, and further, the driving components drive the Coriolis force mass blocks to move in the second direction; and the driving components and the Coriolis force mass blocks are connected, so that the Coriolis force mass blocks are suitable for moving only in the third direction under the action of Coriolis force.

Description

technical field [0001] The invention relates to the field of MEMS, in particular to a high-sensitivity single-axis MEMS gyroscope. Background technique [0002] Micro-gyroscopes based on micro-electro-mechanical systems (MEMS, Micro-Electro-Mechanical-System) have been widely used in consumer electronics, industry, medical, military It has been used more and more in a very wide range of fields. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, it has become a standard configuration. With the gradual trend of portable and lightweight consumer electronics products, the market demand for gyroscope chips is increasingly urgent. [0003] MEMS gyroscopes for this market are mainly capacitive resonant gyroscopes, which include driving mass, Coriolis force (Coriolis force) mass and detection mass. The driving capacitor makes the driving mass vibrate in the driving direction, and drives the Cor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5747G01C19/5656
CPCG01C19/5656G01C19/5747
Inventor 邹波郑青龙刘爽
Owner SENODIA TECH (SHANGHAI) CO LTD
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