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Masks, manufacturing method of masks, open mask plate, application method of open mask plate, and thin film deposition equipment

An open mask and thin film deposition technology, which is applied in the field of mask plates, can solve the problems of packaging layer design position deviation, mask plate deformation, etc., and achieve the effect of good overall effect and not easy to deviate

Active Publication Date: 2019-10-15
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, during the manufacturing process of the mask plate, due to the need for stretching, the stretching will cause deformation of the mask plate, which will cause the deposited encapsulation layer to shift relative to the designed position, resulting in OLED display panels have adverse phenomena such as growing black spots (Growing Black Spots, GDS) due to encapsulation failure

Method used

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  • Masks, manufacturing method of masks, open mask plate, application method of open mask plate, and thin film deposition equipment
  • Masks, manufacturing method of masks, open mask plate, application method of open mask plate, and thin film deposition equipment
  • Masks, manufacturing method of masks, open mask plate, application method of open mask plate, and thin film deposition equipment

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Embodiment Construction

[0064] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0065] like Figure 1a As shown, taking an OLED display panel 1 as an example, the OLED display panel 1 includes a substrate 12, a light emitting device 10 disposed in each sub-pixel of the display area on the substrate 12, and an encapsulation layer 11 covering the display area, wherein the encapsulation layer 11 It includes a first inorganic layer 111 , a second inorganic layer 112 and an organic layer 113 .

[0066] The substrate 12 may be, for example, a g...

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Abstract

The invention provides masks, a manufacturing method of the masks, an open mask plate, an application method of the open mask plate, and thin film deposition equipment, and relates to the technical field of mask plates. The film layer overall deposition effect can be improved. Each mask comprises a plurality of openings. In the thickness direction of each mask, a first groove in a ring shape is formed in the position, located at the edge of each opening, on one side of the mask; and in the thickness direction of each mask, second grooves are formed in the positions, close to the edge of each opening, on the other side of the mask.

Description

technical field [0001] The invention relates to the technical field of mask plates, in particular to a mask plate and a manufacturing method thereof, an opening mask plate and a method for using the same, and thin film deposition equipment. Background technique [0002] OLED (Organic Light-Emitting Diode, organic electroluminescent diode) display panel, through the light-emitting functional layer, self-luminous display, because it does not need a backlight, it has a faster response time, and has a large viewing angle, high contrast, and weight. Lightweight, low power consumption, easy to make flexible and other characteristics, it is considered to be the display device with the most development potential at present. [0003] Since the water and oxygen resistance of the light-emitting functional layer is extremely poor, in order to ensure the quality of the OLED display panel, its packaging technology is particularly critical. Currently, there are two types of cover plate pa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/04C23C16/50H01L51/52
CPCC23C16/042C23C16/50H10K71/166H10K59/873C23C14/042
Inventor 王格蒋志亮
Owner BOE TECH GRP CO LTD
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