Up-lifting vacuum furnace

A technology for pulling rods and furnaces, which is applied in the directions of self-melt pulling method, crystal growth, single crystal growth, etc., and can solve problems such as inability to guarantee crystal growth consistency, leakage, and micro-cracking vacuum environment

Inactive Publication Date: 2019-10-18
MEISHAN BOYA ADVANCED MATERIALS CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

At present, the operation and control system of the home-made vacuum induction furnace for high-temperature crystal growth is semi-automatic, and the crystal growth process (such as seeding necking, shouldering, equal diameter, finishing, cooling, etc.) cannot be realized. Fully automatic control, the crystal growth process is highly dependent on the operator, so the consistency of crystal growth cannot be guaranteed
The fully automatic single crystal growth induction furnace imported from abroad is expensive and difficult to maintain, and is not suitable for mass purchases
In addition, the inner wall of the furnace wall of the double-layer stainless steel water-cooled structure is generally welded on both sides, and the outer wall is welded on one side. Microcracks may occur, causing the vacuum environment to be affected or the cooling medium to leak

Method used

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Embodiment Construction

[0028] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0029] On the contrary, this application covers any alternatives, modifications, equivalent methods and schemes within the spirit and scope of this application as defined by the claims. Further, in order to make the public have a better understanding of the application, some specific details are described in detail in the detailed description of the application below. The present application can be fully understood by those skilled in the art without the description of these detailed parts.

[0030] The embodiment of the present application relates to a crystal growth dev...

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Abstract

The invention discloses an up-lifting vacuum furnace. A crystal growth device includes a furnace, a lifting rod, a moving device and a control system; a thermal field and a heat source are arranged inthe furnace; at least a part of the lifting rod is located in the furnace, and the moving device is connected with the lifting rod in a transmission mode to drive the lifting rod to move up-down and / or rotate; and the control system is used for controlling the moving direction and / or moving speed of the moving device. According to the crystal growth device of the up-lifting vacuum furnace, automatic control of the crystal growth process can be realized, structures of prepared single crystal materials have good consistency, the welding process is improved, and the sealing and corrosion resistance of the furnace are improved.

Description

technical field [0001] The present application relates to the field of crystal materials, in particular to a crystal growth device. Background technique [0002] Single crystal furnace is used to prepare silicon, germanium, gallium arsenide, yttrium aluminum garnet (Y 3 Al 5 o 12 , referred to as YAG), lutetium silicate (Lu 2 SiO 5 , LSO) and other special equipment for intraocular lenses, is a comprehensive system integrating mechanical, electrical, computer, aerodynamic, fluid dynamics, thermodynamics and other disciplines. At present, the operation and control system of the home-made vacuum induction furnace for high-temperature crystal growth is semi-automatic, and the crystal growth process (such as seeding necking, shouldering, equal diameter, finishing, cooling, etc.) cannot be realized. Fully automatic control, the crystal growth process is highly dependent on the operator, so the consistency of crystal growth cannot be guaranteed. Fully automatic single crysta...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/00C30B15/28C30B15/30
CPCC30B15/00C30B15/28C30B15/30
Inventor 王宇官伟明梁振兴
Owner MEISHAN BOYA ADVANCED MATERIALS CO LTD
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