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Device for microwave plating of nano-diamond film

A nano-diamond and microwave technology, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of simple structure, etc., and achieve the effect of less porosity, excellent coating quality and good adaptability of the coating

Active Publication Date: 2019-10-25
成都道启弘环境科技有限公司
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Problems solved by technology

Two-dimensional materials such as SP2 or SP3 thin films can be obtained, and they have good bonding ability with the substrate, but there is currently no related equipment with simple structure and convenient operation

Method used

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  • Device for microwave plating of nano-diamond film

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Embodiment

[0032] Such as figure 1 Shown: a microwave nano-diamond film coating equipment, which mainly consists of a microwave generator 100, a microwave transmitting horn 5, a process inlet pipe 6, a process control valve 7, a microwave shielding layer 9, a rotating tray 10, a cooling coil 11, The water cooling system 12, the exhaust valve 13, the vacuum system 14 and the coating housing 8 are composed, wherein the coating housing 8 is a cavity with sealing performance. Vacuum system 14 is conventional system equipment in this field, and is generally a complete set of vacuum system composed of vacuum pump, PLC program control system, gas storage tank, vacuum pipeline, vacuum valve, external filter assembly, etc. The water cooling system 12 is also conventional equipment in the field, such as water tank / water tank and water pump, so that the circulating water cooling system is composed of water tank / water tank, water pump and cooling coil.

[0033] The microwave generator 100 described...

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Abstract

The invention discloses a device for microwave plating of a nano-diamond film, wherein the device mainly comprises a microwave generator, a microwave transmitting loudspeaker, a process air inlet pipe, a microwave shielding layer, a rotary tray, a water cooling system, a vacuum system and a film coating shell, wherein the film coating shell is a cavity with sealing performance. When the device works, the process gas enters the microwave transmitting loudspeaker through an air inlet pipe, the process gas is cracked and plasmatized by microwaves, and carbon atoms are used as carbon source materials of the diamond-plated film after cracking and plasmatization. The device for microwave plating of the nano-diamond film realizes the SP2 and SP3 type nano-diamond coating by changing the microwavefrequency and the process gas medium. The microwave coating efficiency is remarkable, the thickness of the coated nano-diamond film is uniform, the surface is smooth and flat, the substrate to be coated is not easy to damage, and the device for microwave plating of the nano-diamond film has a very wide application prospect in various industrial fields.

Description

technical field [0001] The invention relates to the technical field of coating nano-diamond films, in particular to a microwave coating device for nano-diamond films. Background technique [0002] With the development of semiconductor coating substrates in the direction of large capacity, high speed and low price, it is very important to realize various high dielectric films and other special performance coatings. The traditional thermal oxidation and thermal chemical vapor deposition methods often cause the redistribution of the diffusion surface, the formation of dislocations and stacking faults due to the high temperature, which is a limiting factor for the coating technology, and the coating technology is the current low-dimensional material. Foundation. Microwave-plated nano-diamond film has the advantages of good step coverage, high deposition rate, extremely thin film layer, high purity and multi-layer repeated coating. [0003] Due to its excellent properties in me...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C16/511
CPCC23C16/274C23C16/511
Inventor 蔡茜付斗才
Owner 成都道启弘环境科技有限公司
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