A kind of preparation method of multilayer film X-ray zone plate
A technology of multi-layer film and zone plate, which is applied in the field of preparation of multi-layer film X-ray zone plate, can solve the problems of self-supporting ability, easy damage to multi-layer film, etc., and achieve the effect of strengthening self-supporting ability.
Active Publication Date: 2022-02-22
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
View PDF7 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The zone plate is the core component of X-ray microscopic imaging technology. When the zone plate is prepared by the slicing method, it is easy to prepare a hard X-ray zone plate with a large aspect ratio. However, if the slicing method is used to prepare a soft In the case of X-ray zone plate, the problem is that it is easy to damage the multilayer film
And if there is a gap between the multilayer film and the central filament, then there will be problems with the self-supporting ability
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0027] The purpose of the present invention is to provide a method for preparing a multilayer film X-ray zone plate to solve the problems in the prior art.
[0028] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0029] The invention provides a method for preparing a ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| wavelength | aaaaa | aaaaa |
Login to View More
Abstract
The invention discloses a preparation method of a multilayer film X-ray zone plate. The specific method is as follows: vertically fix the filamentary sample on the side of the sample holder; use FIB cutting to cut only the multilayer film of the filamentary sample, vertically from above Cut the visible part of the multilayer film downward to a specified thickness; soak the cut part of the sample with liquid glue; rotate the uncut multilayer film part upwards, and fix the cut position with a copper foil with liquid glue. Then use FIB to completely cut off the multilayer film on both sides of the retained multilayer film and the central filament; use the manipulator to transfer the zone plate cut in the above steps; use FIB deposition technology to fix the zone plate at a specific position on the carrier grid; cut off the manipulator , the zone plate is polished to obtain the required prepared zone plate; the invention can realize the preparation of ultra-thin zone plate, and can protect the multi-layer film of the zone plate, because of the protection of liquid glue, it strengthens the ultra-thin The self-supporting ability of the zone plate.
Description
technical field [0001] The invention relates to the technical field of X-ray zone plate preparation, in particular to a method for preparing a multilayer film X-ray zone plate. Background technique [0002] The X-ray wavelength is between 0.01-10nm, and X-ray microscopy technology can be used for non-destructive testing of substances and three-dimensional microscopic imaging. The zone plate is the core component of X-ray microscopic imaging technology. When the zone plate is prepared by the slicing method, it is easy to prepare a hard X-ray zone plate with a large aspect ratio. However, if the slicing method is used to prepare a soft In the case of X-ray zone plates, there is a problem that the multilayer film is easily damaged. And if there is a gap between the multilayer film and the central filament, then the self-supporting ability will be problematic. [0003] Therefore, when preparing an ultra-thin zone plate, how to ensure that the multi-layer film of the zone plate...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/28
CPCG01N1/28
Inventor 孔祥东姚广宇李艳丽董增雅张炜韩立
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI