Polycrystalline silicon ingot furnace
A polycrystalline silicon ingot furnace and ingot casting technology, which is applied in the directions of polycrystalline material growth, crystal growth, single crystal growth, etc., can solve problems such as poor thermal field regulation performance, and achieve the effect of improving regulation ability and good regulation effect.
Pending Publication Date: 2019-11-15
ZHEJIANG JINKO SOLAR CO LTD +1
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Problems solved by technology
[0003] The purpose of the present invention is to provide a polysilicon ingot furnace, which solves the problem of poor thermal field regulation performance in the ingot furnace in the prior art, and improves the thermal field regulation performance
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[0027] At present, in the polysilicon ingot furnace, there are two main solutions to adjust the temperature of the ingot furnace: one is to plug the heat insulation strip on the side of the DS block in the hotter area to block the heat radiation of the heater, The heat insulation strip inside the steel cage is heightened in the cold area to reduce heat loss.
[0028] The heat insulation strip plugged on the side of the DS block has an impact on the operation of the casting furnace, so the heat insulation strip needs to be disassembled once every time the furnace is thrown out. Since the heat insulation strip is made of carbon fiber, frequent disassembly and assembly are easy to wear and tear, which affects the heat insulation performance; Adding heat insulation strips in the high steel cage reduces the heat loss at the heightened place, but as the crystal grows, the steel cage needs to be lifted slowly, and the lifting of the steel cage will weaken the heat insulation performan...
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The invention discloses a polycrystalline silicon ingot furnace. The polycrystalline silicon ingot furnace comprises a crucible for bearing ingot silicon materials, a DS block for supporting the crucible, thermal insulation blocks and cooling blocks, wherein the thermal insulation blocks and the cooling blocks are detachably arranged on the surface, back to the bottom of the crucible, of the DS block and used for adjusting the distribution of the heat field at the bottom of the crucible, and the distribution positions of the thermal insulation blocks and the cooling blocks on the surface of the DS block can be adjusted. In the ingot furnace, the thermal insulation blocks and the cooling blocks are arranged on the DS block for supporting the crucible, thermal insulation can be conducted onthe positions where cooling is too fast, and cooling can also be accelerated at the positions where cooling is too slow; compared with the prior art that the heat field temperature is adjusted througha thermal insulation layer, the furnace has a better adjusting effect due to the thermal insulation blocks and the cooling blocks for temperature adjustment; in addition, the thermal insulation blocks and the cooling blocks are detachably connected, so different requirements based on the ingot process can be conveniently met, the layout of the thermal insulation blocks and the cooling blocks is changed, and the heat field adjusting capacity of the ingot furnace is improved.
Description
technical field [0001] The invention relates to the technical field of polycrystalline ingot casting, in particular to a polycrystalline silicon ingot casting furnace. Background technique [0002] The polysilicon ingot process is one of the main processes for obtaining pure silicon materials, which can be used for the production of photovoltaic cells and the production of other semiconductor devices. In the process of polysilicon ingot casting, temperature is one of the important factors affecting the growth of silicon ingot. At present, in various polysilicon ingot casting processes, in order to ensure that the temperature in the ingot furnace meets the growth requirements of silicon ingots, according to the heater distribution position of the ingot furnace and the influence of the structure of the ingot furnace itself on heat dissipation, the ingot furnace Install insulation on top. However, in the polysilicon ingot casting process, different types of crystalline silico...
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Login to View More IPC IPC(8): C30B28/06C30B29/06
CPCC30B28/06C30B29/06
Inventor 吴君立黄纪德曹瑞宏龚宇琦夏志鹏朱惠君张昕宇金浩
Owner ZHEJIANG JINKO SOLAR CO LTD