Anti-micro-vibration platform

Abstract

The invention provides an anti-micro-vibration platform, which includes a process layer and a return air layer which are layered in the vertical direction. The process layer is located on the upper part of the return air layer. The anti-micro-vibration platform further includes a first enclosure wall arranged on the process layer in a surrounding mode and a second enclosure wall arranged on the return air layer in a surrounding mode, further includes a filter which is arranged at the top of the first enclosure wall and is opposite to the process layer, and further includes a plurality of support columns which are used for supporting the process layer and the return air layer and arranged in an array. The process layer includes cheese boards located between every two adjacent support columns in each row or each column of the support columns, and waffle boards located in the O-shaped area enclosed by the cheese boards, and the cheese boards and the waffle boards are provided with throughholes communicating with a first return air passageway. The cheese boards are arranged between every two adjacent support columns on the process layer, the waffle boards are arranged in the O-shapedarea enclosed by the cheese boards, the vertical stiffness of the process layer is improved, and the anti-micro-vibration performance of the process layer is improved.

Description

technical field [0001] The invention relates to the technical field of anti-microvibration building structures of clean workshops, in particular to an anti-microvibration platform. Background technique [0002] In the process of integrated circuit production, due to the smaller and smaller line width and more and more environmental factors, from the beginning of a silicon chip to the output of a chip, hundreds of physical and chemical processing procedures are required in the middle. . During this period, if there is any contamination, a large number of problematic products will be produced. For example, in the photolithography process, a small micro-vibration will cause inaccurate focus, blurred lines after exposure, and reduce the yield of products. In addition to the requirements for anti-micro-vibration, integrated circuits also have relatively high air quality requirements during the production process. Air retention in the production plant will carry more dust, partic...

AI Technical Summary

Problems solved by technology

However, the anti-microvibration platform built by this setting method has poor stiffness in the vertical direction.

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