Hydrogen detection element, method for manufacturing hydrogen detection element, and hydrogen detection device
A manufacturing method and component technology, which can be applied to the measurement device, the structural details of the gas analyzer, the measurement of the phase influence characteristics, etc., and can solve problems such as fire
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no. 1 Embodiment approach
[0044] figure 1 It is a schematic configuration diagram of a hydrogen detection device 100 including the hydrogen detection element 1 according to the first embodiment.
[0045] The hydrogen detection device 100 includes a hydrogen detection element 1 , a nitrogen supply unit 11 , a hydrogen supply unit 12 , a mixer 13 , a chamber 20 , a light source unit 30 , a light receiving unit 40 , and a calculation unit 50 .
[0046] The mixer 13 mixes the nitrogen supplied from the nitrogen supply unit 11 and the hydrogen supplied from the hydrogen supply unit 12 at a predetermined mixing ratio (for example, the hydrogen concentration is 4%), and flows through the pipe 14 at a predetermined flow rate (for example, 500 mL / h). ) is supplied to the chamber 20. The chamber 20 houses the hydrogen detection element 1 . A pipe 14 for introducing a mixed gas of nitrogen and hydrogen and a pipe 15 for exhausting the mixed gas are connected to the chamber 20 .
[0047] The light source unit 3...
no. 2 Embodiment approach
[0062] Next, refer to Figure 6 ~ Figure 9 , the second embodiment of the hydrogen detection element 1 will be described.
[0063] In the above-mentioned first embodiment, the configuration in which the hydrogen-absorbing metal 3 is made of palladium has been exemplified, but in the second embodiment, a configuration including palladium and a noble metal as a catalyst will be described. As the noble metal, gold (Au), silver (Ag), platinum (Pt) or the like can be used, and the case of using gold will be described in this embodiment.
[0064] Figure 6 It is a schematic configuration diagram of a sputtering apparatus SP for forming a hydrogen-absorbing metal film on a substrate 2 . The sputtering apparatus SP is equipped with the board|substrate holder 60, the palladium sputtering part 61 which has a palladium target, and the gold sputtering part 62 which has a gold target.
[0065] A plurality of (in Figure 6 is 4 pieces) Substrate 2. The substrate holder 60 is rotatable ...
no. 3 Embodiment approach
[0076] Next, refer to Figure 10 ~ Figure 14 , the third embodiment of the hydrogen detection element 1 will be described.
[0077] In the above-mentioned first embodiment, the hydrogen-absorbing metal 3 has been described as a columnar structure protruding from the surface of the base material 2. In the third embodiment, the hydrogen-absorbing metal 3 has holes, The structure of planar film formation will be described.
[0078] Figure 10 It is a partial sectional view in the thickness direction of the hydrogen detection element 1 . Figure 11 This is a photographic view of the hydrogen detection element 1 viewed from above. In the hydrogen detecting element 1 of the present embodiment, the hydrogen absorbing metal 3 is formed into a planar film on the surface 2 a of the substrate. A plurality of holes 4 arranged at predetermined positions are formed in the hydrogen absorbing metal 3 . In other words, the hydrogen-absorbing metal 3 is formed into a planar film on regions...
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Abstract
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